6/22/2010	12:04:44 AM	Helium MFC set to  500.000000
6/22/2010	12:04:45 AM	Helium valve opened
6/22/2010	12:05:53 AM	Helium valve closed
6/22/2010	12:06:25 AM	Helium valve opened
6/22/2010	12:09:42 AM	Helium valve closed
6/22/2010	12:13:18 AM	Bypass valve closed
6/22/2010	12:13:19 AM	Main Vac valve closed
6/22/2010	12:13:36 AM	Bypass valve opened
6/22/2010	12:13:37 AM	Main Vac valve opened
6/22/2010	12:13:38 AM	Helium valve opened
6/22/2010	12:17:17 AM	Helium valve closed
6/22/2010	12:18:14 AM	Tube furnace set to 200
6/22/2010	12:18:45 AM	Helium valve opened
6/22/2010	12:20:40 AM	Helium valve closed
6/22/2010	12:20:49 AM	Tube furnace set to 0
6/22/2010	12:22:08 AM	Helium MFC set to  50.000000
6/22/2010	12:22:09 AM	Helium valve opened
6/22/2010	12:23:14 AM	Helium valve closed
6/22/2010	12:36:21 AM	Helium valve opened
6/22/2010	12:36:27 AM	Helium MFC set to  500.000000
6/22/2010	12:50:04 AM	Helium valve closed
6/22/2010	1:02:07 AM	Helium valve opened
6/22/2010	1:09:21 AM	Helium valve closed
6/22/2010	1:12:34 AM	Bypass valve closed
6/22/2010	1:12:34 AM	Main Vac valve closed
6/22/2010	1:12:47 AM	Bypass valve opened
6/22/2010	1:12:48 AM	Main Vac valve opened
6/22/2010	1:13:03 AM	Helium valve opened
6/22/2010	1:13:06 AM	Helium valve closed
6/22/2010	1:14:28 AM	Helium valve opened
6/22/2010	1:14:53 AM	Helium valve closed
6/22/2010	1:15:42 AM	Recipe started at 1:15 AM
6/22/2010	1:15:42 AM	Helium valve closed
6/22/2010	1:15:42 AM	BCl3 valve closed
6/22/2010	1:15:42 AM	PH3 valve closed
6/22/2010	1:15:42 AM	SiCl4 pre valve closed
6/22/2010	1:15:42 AM	SiCl4 post valve closed
6/22/2010	1:15:42 AM	Main Vac valve closed
6/22/2010	1:15:42 AM	Bypass valve closed
6/22/2010	1:15:42 AM	Bubbler valve closed
6/22/2010	1:15:42 AM	H2 valve opened
6/22/2010	1:15:42 AM	Helium MFC set to  0.000000
6/22/2010	1:15:42 AM	H2 MFC set to  500.000000
6/22/2010	1:15:42 AM	BCl3 MFC set to  0.000000
6/22/2010	1:15:42 AM	PHl3 MFC set to  0.000000
6/22/2010	1:15:42 AM	SiCl4 MFC set to  0.000000
6/22/2010	1:15:42 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	1:15:42 AM	Tube furnace set to 0
6/22/2010	1:17:02 AM	Helium valve closed
6/22/2010	1:17:02 AM	BCl3 valve closed
6/22/2010	1:17:02 AM	PH3 valve closed
6/22/2010	1:17:02 AM	SiCl4 pre valve closed
6/22/2010	1:17:02 AM	SiCl4 post valve closed
6/22/2010	1:17:02 AM	Main Vac valve closed
6/22/2010	1:17:02 AM	Bypass valve closed
6/22/2010	1:17:02 AM	H2 valve opened
6/22/2010	1:17:02 AM	Bubbler valve opened
6/22/2010	1:17:02 AM	Helium MFC set to  0.000000
6/22/2010	1:17:02 AM	H2 MFC set to  500.000000
6/22/2010	1:17:02 AM	BCl3 MFC set to  0.000000
6/22/2010	1:17:02 AM	PHl3 MFC set to  0.000000
6/22/2010	1:17:02 AM	SiCl4 MFC set to  0.000000
6/22/2010	1:17:02 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	1:17:02 AM	Tube furnace set to 1000
6/22/2010	1:37:02 AM	Helium valve closed
6/22/2010	1:37:02 AM	PH3 valve closed
6/22/2010	1:37:02 AM	Main Vac valve closed
6/22/2010	1:37:02 AM	Bypass valve closed
6/22/2010	1:37:02 AM	H2 valve opened
6/22/2010	1:37:02 AM	BCl3 valve opened
6/22/2010	1:37:02 AM	SiCl4 pre valve opened
6/22/2010	1:37:02 AM	SiCl4 post valve opened
6/22/2010	1:37:02 AM	Bubbler valve opened
6/22/2010	1:37:02 AM	Helium MFC set to  0.000000
6/22/2010	1:37:02 AM	H2 MFC set to  500.000000
6/22/2010	1:37:02 AM	BCl3 MFC set to  35.000000
6/22/2010	1:37:02 AM	PHl3 MFC set to  0.000000
6/22/2010	1:37:02 AM	SiCl4 MFC set to  50.000000
6/22/2010	1:37:02 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	1:37:02 AM	Tube furnace set to 1000
6/22/2010	1:52:02 AM	H2 valve closed
6/22/2010	1:52:02 AM	BCl3 valve closed
6/22/2010	1:52:02 AM	PH3 valve closed
6/22/2010	1:52:02 AM	SiCl4 pre valve closed
6/22/2010	1:52:02 AM	SiCl4 post valve closed
6/22/2010	1:52:02 AM	Main Vac valve closed
6/22/2010	1:52:02 AM	Bypass valve closed
6/22/2010	1:52:02 AM	Helium valve opened
6/22/2010	1:52:02 AM	Bubbler valve opened
6/22/2010	1:52:02 AM	Helium MFC set to  500.000000
6/22/2010	1:52:02 AM	H2 MFC set to  0.000000
6/22/2010	1:52:02 AM	BCl3 MFC set to  0.000000
6/22/2010	1:52:02 AM	PHl3 MFC set to  0.000000
6/22/2010	1:52:02 AM	SiCl4 MFC set to  0.000000
6/22/2010	1:52:02 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	1:52:02 AM	Tube furnace set to 0
6/22/2010	2:12:03 AM	Helium valve closed
6/22/2010	2:12:03 AM	H2 valve closed
6/22/2010	2:12:03 AM	BCl3 valve closed
6/22/2010	2:12:03 AM	PH3 valve closed
6/22/2010	2:12:03 AM	SiCl4 pre valve closed
6/22/2010	2:12:03 AM	SiCl4 post valve closed
6/22/2010	2:12:03 AM	Main Vac valve closed
6/22/2010	2:12:03 AM	Bypass valve closed
6/22/2010	2:12:03 AM	Bubbler valve closed
6/22/2010	2:12:03 AM	Helium MFC set to  0.000000
6/22/2010	2:12:03 AM	H2 MFC set to  0.000000
6/22/2010	2:12:03 AM	BCl3 MFC set to  0.000000
6/22/2010	2:12:03 AM	PHl3 MFC set to  0.000000
6/22/2010	2:12:03 AM	SiCl4 MFC set to  0.000000
6/22/2010	2:12:03 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:12:03 AM	Tube furnace set to 0
6/22/2010	2:12:03 AM	Run finished at 2:12 AM
6/22/2010	2:38:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/22/2010	2:38:55 AM	Recipe started at 2:38 AM
6/22/2010	2:38:55 AM	H2 valve closed
6/22/2010	2:38:55 AM	BCl3 valve closed
6/22/2010	2:38:55 AM	PH3 valve closed
6/22/2010	2:38:55 AM	SiCl4 pre valve closed
6/22/2010	2:38:55 AM	SiCl4 post valve closed
6/22/2010	2:38:55 AM	Main Vac valve closed
6/22/2010	2:38:55 AM	Bypass valve closed
6/22/2010	2:38:55 AM	Bubbler valve closed
6/22/2010	2:38:56 AM	Helium valve opened
6/22/2010	2:38:56 AM	Helium MFC set to  500.000000
6/22/2010	2:38:56 AM	H2 MFC set to  0.000000
6/22/2010	2:38:56 AM	BCl3 MFC set to  0.000000
6/22/2010	2:38:56 AM	PHl3 MFC set to  0.000000
6/22/2010	2:38:56 AM	SiCl4 MFC set to  0.000000
6/22/2010	2:38:56 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:38:56 AM	Tube furnace set to 0
6/22/2010	2:39:02 AM	Helium valve closed
6/22/2010	2:39:02 AM	H2 valve closed
6/22/2010	2:39:02 AM	BCl3 valve closed
6/22/2010	2:39:02 AM	PH3 valve closed
6/22/2010	2:39:02 AM	SiCl4 pre valve closed
6/22/2010	2:39:02 AM	SiCl4 post valve closed
6/22/2010	2:39:02 AM	Main Vac valve closed
6/22/2010	2:39:02 AM	Bypass valve closed
6/22/2010	2:39:02 AM	Bubbler valve closed
6/22/2010	2:39:02 AM	Helium MFC set to  0.000000
6/22/2010	2:39:02 AM	H2 MFC set to  0.000000
6/22/2010	2:39:02 AM	BCl3 MFC set to  0.000000
6/22/2010	2:39:02 AM	PHl3 MFC set to  0.000000
6/22/2010	2:39:02 AM	SiCl4 MFC set to  0.000000
6/22/2010	2:39:02 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:39:02 AM	Tube furnace set to 0
6/22/2010	2:39:03 AM	Run finished at 2:39 AM
6/22/2010	2:39:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/22/2010	2:52:40 AM	Recipe started at 2:52 AM
6/22/2010	2:52:40 AM	H2 valve closed
6/22/2010	2:52:40 AM	BCl3 valve closed
6/22/2010	2:52:40 AM	PH3 valve closed
6/22/2010	2:52:40 AM	SiCl4 pre valve closed
6/22/2010	2:52:40 AM	SiCl4 post valve closed
6/22/2010	2:52:40 AM	Main Vac valve closed
6/22/2010	2:52:40 AM	Bypass valve closed
6/22/2010	2:52:40 AM	Bubbler valve closed
6/22/2010	2:52:40 AM	Helium valve opened
6/22/2010	2:52:40 AM	Helium MFC set to  500.000000
6/22/2010	2:52:40 AM	H2 MFC set to  0.000000
6/22/2010	2:52:40 AM	BCl3 MFC set to  0.000000
6/22/2010	2:52:40 AM	PHl3 MFC set to  0.000000
6/22/2010	2:52:40 AM	SiCl4 MFC set to  0.000000
6/22/2010	2:52:40 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:52:40 AM	Tube furnace set to 0
6/22/2010	2:52:42 AM	Helium valve closed
6/22/2010	2:52:42 AM	H2 valve closed
6/22/2010	2:52:42 AM	BCl3 valve closed
6/22/2010	2:52:42 AM	PH3 valve closed
6/22/2010	2:52:42 AM	SiCl4 pre valve closed
6/22/2010	2:52:42 AM	SiCl4 post valve closed
6/22/2010	2:52:42 AM	Main Vac valve closed
6/22/2010	2:52:42 AM	Bypass valve closed
6/22/2010	2:52:42 AM	Bubbler valve closed
6/22/2010	2:52:42 AM	Helium MFC set to  0.000000
6/22/2010	2:52:42 AM	H2 MFC set to  0.000000
6/22/2010	2:52:42 AM	BCl3 MFC set to  0.000000
6/22/2010	2:52:42 AM	PHl3 MFC set to  0.000000
6/22/2010	2:52:42 AM	SiCl4 MFC set to  0.000000
6/22/2010	2:52:42 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:52:42 AM	Tube furnace set to 0
6/22/2010	2:52:57 AM	Helium valve closed
6/22/2010	2:52:57 AM	H2 valve closed
6/22/2010	2:52:57 AM	BCl3 valve closed
6/22/2010	2:52:57 AM	PH3 valve closed
6/22/2010	2:52:57 AM	SiCl4 pre valve closed
6/22/2010	2:52:57 AM	SiCl4 post valve closed
6/22/2010	2:52:57 AM	Main Vac valve closed
6/22/2010	2:52:57 AM	Bubbler valve closed
6/22/2010	2:52:57 AM	Bypass valve opened
6/22/2010	2:52:57 AM	Helium MFC set to  0.000000
6/22/2010	2:52:57 AM	H2 MFC set to  0.000000
6/22/2010	2:52:57 AM	BCl3 MFC set to  0.000000
6/22/2010	2:52:57 AM	PHl3 MFC set to  0.000000
6/22/2010	2:52:57 AM	SiCl4 MFC set to  0.000000
6/22/2010	2:52:57 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:52:57 AM	Tube furnace set to 0
6/22/2010	2:53:44 AM	Helium valve closed
6/22/2010	2:53:44 AM	H2 valve closed
6/22/2010	2:53:44 AM	BCl3 valve closed
6/22/2010	2:53:44 AM	PH3 valve closed
6/22/2010	2:53:44 AM	SiCl4 pre valve closed
6/22/2010	2:53:44 AM	SiCl4 post valve closed
6/22/2010	2:53:44 AM	Bubbler valve closed
6/22/2010	2:53:44 AM	Main Vac valve opened
6/22/2010	2:53:45 AM	Bypass valve opened
6/22/2010	2:53:45 AM	Helium MFC set to  0.000000
6/22/2010	2:53:45 AM	H2 MFC set to  0.000000
6/22/2010	2:53:45 AM	BCl3 MFC set to  0.000000
6/22/2010	2:53:45 AM	PHl3 MFC set to  0.000000
6/22/2010	2:53:45 AM	SiCl4 MFC set to  0.000000
6/22/2010	2:53:45 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:53:45 AM	Tube furnace set to 0
6/22/2010	2:58:45 AM	H2 valve closed
6/22/2010	2:58:45 AM	BCl3 valve closed
6/22/2010	2:58:45 AM	PH3 valve closed
6/22/2010	2:58:45 AM	SiCl4 pre valve closed
6/22/2010	2:58:45 AM	SiCl4 post valve closed
6/22/2010	2:58:45 AM	Main Vac valve closed
6/22/2010	2:58:45 AM	Bypass valve closed
6/22/2010	2:58:45 AM	Bubbler valve closed
6/22/2010	2:58:45 AM	Helium valve opened
6/22/2010	2:58:45 AM	Helium MFC set to  500.000000
6/22/2010	2:58:45 AM	H2 MFC set to  0.000000
6/22/2010	2:58:45 AM	BCl3 MFC set to  0.000000
6/22/2010	2:58:45 AM	PHl3 MFC set to  0.000000
6/22/2010	2:58:45 AM	SiCl4 MFC set to  0.000000
6/22/2010	2:58:45 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:58:45 AM	Tube furnace set to 0
6/22/2010	3:00:04 AM	Helium valve closed
6/22/2010	3:00:04 AM	H2 valve closed
6/22/2010	3:00:04 AM	BCl3 valve closed
6/22/2010	3:00:04 AM	PH3 valve closed
6/22/2010	3:00:04 AM	SiCl4 pre valve closed
6/22/2010	3:00:04 AM	SiCl4 post valve closed
6/22/2010	3:00:04 AM	Main Vac valve closed
6/22/2010	3:00:04 AM	Bypass valve closed
6/22/2010	3:00:04 AM	Bubbler valve closed
6/22/2010	3:00:04 AM	Helium MFC set to  0.000000
6/22/2010	3:00:04 AM	H2 MFC set to  0.000000
6/22/2010	3:00:04 AM	BCl3 MFC set to  0.000000
6/22/2010	3:00:04 AM	PHl3 MFC set to  0.000000
6/22/2010	3:00:04 AM	SiCl4 MFC set to  0.000000
6/22/2010	3:00:04 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	3:00:04 AM	Tube furnace set to 0
6/22/2010	3:00:19 AM	Helium valve closed
6/22/2010	3:00:19 AM	H2 valve closed
6/22/2010	3:00:19 AM	BCl3 valve closed
6/22/2010	3:00:19 AM	PH3 valve closed
6/22/2010	3:00:19 AM	SiCl4 pre valve closed
6/22/2010	3:00:19 AM	SiCl4 post valve closed
6/22/2010	3:00:19 AM	Main Vac valve closed
6/22/2010	3:00:19 AM	Bubbler valve closed
6/22/2010	3:00:19 AM	Bypass valve opened
6/22/2010	3:00:19 AM	Helium MFC set to  0.000000
6/22/2010	3:00:19 AM	H2 MFC set to  0.000000
6/22/2010	3:00:19 AM	BCl3 MFC set to  0.000000
6/22/2010	3:00:19 AM	PHl3 MFC set to  0.000000
6/22/2010	3:00:19 AM	SiCl4 MFC set to  0.000000
6/22/2010	3:00:19 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	3:00:19 AM	Tube furnace set to 0
6/22/2010	3:00:52 AM	Helium valve closed
6/22/2010	3:00:52 AM	H2 valve closed
6/22/2010	3:00:52 AM	BCl3 valve closed
6/22/2010	3:00:52 AM	PH3 valve closed
6/22/2010	3:00:52 AM	SiCl4 pre valve closed
6/22/2010	3:00:52 AM	SiCl4 post valve closed
6/22/2010	3:00:52 AM	Bubbler valve closed
6/22/2010	3:00:52 AM	Main Vac valve opened
6/22/2010	3:00:52 AM	Bypass valve opened
6/22/2010	3:00:52 AM	Helium MFC set to  0.000000
6/22/2010	3:00:52 AM	H2 MFC set to  0.000000
6/22/2010	3:00:52 AM	BCl3 MFC set to  0.000000
6/22/2010	3:00:52 AM	PHl3 MFC set to  0.000000
6/22/2010	3:00:52 AM	SiCl4 MFC set to  0.000000
6/22/2010	3:00:52 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	3:00:52 AM	Tube furnace set to 0
6/22/2010	3:05:52 AM	H2 valve closed
6/22/2010	3:05:52 AM	BCl3 valve closed
6/22/2010	3:05:52 AM	PH3 valve closed
6/22/2010	3:05:52 AM	SiCl4 pre valve closed
6/22/2010	3:05:52 AM	SiCl4 post valve closed
6/22/2010	3:05:52 AM	Main Vac valve closed
6/22/2010	3:05:52 AM	Bypass valve closed
6/22/2010	3:05:52 AM	Bubbler valve closed
6/22/2010	3:05:52 AM	Helium valve opened
6/22/2010	3:05:52 AM	Helium MFC set to  500.000000
6/22/2010	3:05:52 AM	H2 MFC set to  0.000000
6/22/2010	3:05:52 AM	BCl3 MFC set to  0.000000
6/22/2010	3:05:52 AM	PHl3 MFC set to  0.000000
6/22/2010	3:05:52 AM	SiCl4 MFC set to  0.000000
6/22/2010	3:05:52 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	3:05:52 AM	Tube furnace set to 0
6/22/2010	3:07:11 AM	Helium valve closed
6/22/2010	3:07:11 AM	H2 valve closed
6/22/2010	3:07:11 AM	BCl3 valve closed
6/22/2010	3:07:11 AM	PH3 valve closed
6/22/2010	3:07:11 AM	SiCl4 pre valve closed
6/22/2010	3:07:11 AM	SiCl4 post valve closed
6/22/2010	3:07:11 AM	Main Vac valve closed
6/22/2010	3:07:11 AM	Bypass valve closed
6/22/2010	3:07:11 AM	Bubbler valve closed
6/22/2010	3:07:11 AM	Helium MFC set to  0.000000
6/22/2010	3:07:11 AM	H2 MFC set to  0.000000
6/22/2010	3:07:11 AM	BCl3 MFC set to  0.000000
6/22/2010	3:07:11 AM	PHl3 MFC set to  0.000000
6/22/2010	3:07:11 AM	SiCl4 MFC set to  0.000000
6/22/2010	3:07:11 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	3:07:11 AM	Tube furnace set to 0
6/22/2010	3:07:26 AM	Helium valve closed
6/22/2010	3:07:26 AM	H2 valve closed
6/22/2010	3:07:26 AM	BCl3 valve closed
6/22/2010	3:07:26 AM	PH3 valve closed
6/22/2010	3:07:26 AM	SiCl4 pre valve closed
6/22/2010	3:07:26 AM	SiCl4 post valve closed
6/22/2010	3:07:26 AM	Main Vac valve closed
6/22/2010	3:07:26 AM	Bubbler valve closed
6/22/2010	3:07:26 AM	Bypass valve opened
6/22/2010	3:07:26 AM	Helium MFC set to  0.000000
6/22/2010	3:07:26 AM	H2 MFC set to  0.000000
6/22/2010	3:07:26 AM	BCl3 MFC set to  0.000000
6/22/2010	3:07:26 AM	PHl3 MFC set to  0.000000
6/22/2010	3:07:26 AM	SiCl4 MFC set to  0.000000
6/22/2010	3:07:26 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	3:07:26 AM	Tube furnace set to 0
6/22/2010	3:07:59 AM	Helium valve closed
6/22/2010	3:07:59 AM	H2 valve closed
6/22/2010	3:07:59 AM	BCl3 valve closed
6/22/2010	3:07:59 AM	PH3 valve closed
6/22/2010	3:07:59 AM	SiCl4 pre valve closed
6/22/2010	3:07:59 AM	SiCl4 post valve closed
6/22/2010	3:07:59 AM	Bubbler valve closed
6/22/2010	3:07:59 AM	Main Vac valve opened
6/22/2010	3:07:59 AM	Bypass valve opened
6/22/2010	3:07:59 AM	Helium MFC set to  0.000000
6/22/2010	3:07:59 AM	H2 MFC set to  0.000000
6/22/2010	3:07:59 AM	BCl3 MFC set to  0.000000
6/22/2010	3:07:59 AM	PHl3 MFC set to  0.000000
6/22/2010	3:07:59 AM	SiCl4 MFC set to  0.000000
6/22/2010	3:07:59 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	3:07:59 AM	Tube furnace set to 0
6/22/2010	3:12:59 AM	H2 valve closed
6/22/2010	3:12:59 AM	BCl3 valve closed
6/22/2010	3:12:59 AM	PH3 valve closed
6/22/2010	3:12:59 AM	SiCl4 pre valve closed
6/22/2010	3:12:59 AM	SiCl4 post valve closed
6/22/2010	3:12:59 AM	Bubbler valve closed
6/22/2010	3:12:59 AM	Helium valve opened
6/22/2010	3:12:59 AM	Main Vac valve opened
6/22/2010	3:12:59 AM	Bypass valve opened
6/22/2010	3:12:59 AM	Helium MFC set to  500.000000
6/22/2010	3:12:59 AM	H2 MFC set to  0.000000
6/22/2010	3:12:59 AM	BCl3 MFC set to  0.000000
6/22/2010	3:12:59 AM	PHl3 MFC set to  0.000000
6/22/2010	3:12:59 AM	SiCl4 MFC set to  0.000000
6/22/2010	3:12:59 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	3:12:59 AM	Tube furnace set to 0
6/22/2010	3:17:59 AM	Helium valve closed
6/22/2010	3:17:59 AM	H2 valve closed
6/22/2010	3:17:59 AM	BCl3 valve closed
6/22/2010	3:17:59 AM	PH3 valve closed
6/22/2010	3:17:59 AM	SiCl4 pre valve closed
6/22/2010	3:17:59 AM	SiCl4 post valve closed
6/22/2010	3:17:59 AM	Bubbler valve closed
6/22/2010	3:17:59 AM	Main Vac valve opened
6/22/2010	3:17:59 AM	Bypass valve opened
6/22/2010	3:17:59 AM	Helium MFC set to  0.000000
6/22/2010	3:17:59 AM	H2 MFC set to  0.000000
6/22/2010	3:17:59 AM	BCl3 MFC set to  0.000000
6/22/2010	3:17:59 AM	PHl3 MFC set to  0.000000
6/22/2010	3:17:59 AM	SiCl4 MFC set to  0.000000
6/22/2010	3:17:59 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	3:18:00 AM	Tube furnace set to 0
6/22/2010	3:23:00 AM	H2 valve closed
6/22/2010	3:23:00 AM	BCl3 valve closed
6/22/2010	3:23:00 AM	PH3 valve closed
6/22/2010	3:23:00 AM	SiCl4 pre valve closed
6/22/2010	3:23:00 AM	SiCl4 post valve closed
6/22/2010	3:23:00 AM	Bubbler valve closed
6/22/2010	3:23:00 AM	Helium valve opened
6/22/2010	3:23:00 AM	Main Vac valve opened
6/22/2010	3:23:00 AM	Bypass valve opened
6/22/2010	3:23:00 AM	Helium MFC set to  500.000000
6/22/2010	3:23:00 AM	H2 MFC set to  0.000000
6/22/2010	3:23:00 AM	BCl3 MFC set to  0.000000
6/22/2010	3:23:00 AM	PHl3 MFC set to  0.000000
6/22/2010	3:23:00 AM	SiCl4 MFC set to  0.000000
6/22/2010	3:23:00 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	3:23:00 AM	Tube furnace set to 0
6/22/2010	3:28:00 AM	Helium valve closed
6/22/2010	3:28:00 AM	H2 valve closed
6/22/2010	3:28:00 AM	BCl3 valve closed
6/22/2010	3:28:00 AM	PH3 valve closed
6/22/2010	3:28:00 AM	SiCl4 pre valve closed
6/22/2010	3:28:00 AM	SiCl4 post valve closed
6/22/2010	3:28:00 AM	Bubbler valve closed
6/22/2010	3:28:00 AM	Main Vac valve opened
6/22/2010	3:28:00 AM	Bypass valve opened
6/22/2010	3:28:00 AM	Helium MFC set to  0.000000
6/22/2010	3:28:00 AM	H2 MFC set to  0.000000
6/22/2010	3:28:00 AM	BCl3 MFC set to  0.000000
6/22/2010	3:28:00 AM	PHl3 MFC set to  0.000000
6/22/2010	3:28:00 AM	SiCl4 MFC set to  0.000000
6/22/2010	3:28:00 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	3:28:00 AM	Tube furnace set to 0
6/22/2010	3:33:00 AM	H2 valve closed
6/22/2010	3:33:00 AM	BCl3 valve closed
6/22/2010	3:33:00 AM	PH3 valve closed
6/22/2010	3:33:00 AM	SiCl4 pre valve closed
6/22/2010	3:33:00 AM	SiCl4 post valve closed
6/22/2010	3:33:00 AM	Bubbler valve closed
6/22/2010	3:33:00 AM	Helium valve opened
6/22/2010	3:33:00 AM	Main Vac valve opened
6/22/2010	3:33:00 AM	Bypass valve opened
6/22/2010	3:33:00 AM	Helium MFC set to  500.000000
6/22/2010	3:33:00 AM	H2 MFC set to  0.000000
6/22/2010	3:33:00 AM	BCl3 MFC set to  0.000000
6/22/2010	3:33:00 AM	PHl3 MFC set to  0.000000
6/22/2010	3:33:00 AM	SiCl4 MFC set to  0.000000
6/22/2010	3:33:00 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	3:33:00 AM	Tube furnace set to 0
6/22/2010	3:38:00 AM	Helium valve closed
6/22/2010	3:38:00 AM	H2 valve closed
6/22/2010	3:38:00 AM	BCl3 valve closed
6/22/2010	3:38:00 AM	PH3 valve closed
6/22/2010	3:38:00 AM	SiCl4 pre valve closed
6/22/2010	3:38:00 AM	SiCl4 post valve closed
6/22/2010	3:38:00 AM	Bubbler valve closed
6/22/2010	3:38:00 AM	Main Vac valve opened
6/22/2010	3:38:00 AM	Bypass valve opened
6/22/2010	3:38:00 AM	Helium MFC set to  0.000000
6/22/2010	3:38:00 AM	H2 MFC set to  0.000000
6/22/2010	3:38:00 AM	BCl3 MFC set to  0.000000
6/22/2010	3:38:00 AM	PHl3 MFC set to  0.000000
6/22/2010	3:38:00 AM	SiCl4 MFC set to  0.000000
6/22/2010	3:38:00 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	3:38:00 AM	Tube furnace set to 0
6/22/2010	3:43:00 AM	H2 valve closed
6/22/2010	3:43:00 AM	BCl3 valve closed
6/22/2010	3:43:00 AM	PH3 valve closed
6/22/2010	3:43:00 AM	SiCl4 pre valve closed
6/22/2010	3:43:00 AM	SiCl4 post valve closed
6/22/2010	3:43:00 AM	Bubbler valve closed
6/22/2010	3:43:00 AM	Helium valve opened
6/22/2010	3:43:00 AM	Main Vac valve opened
6/22/2010	3:43:00 AM	Bypass valve opened
6/22/2010	3:43:00 AM	Helium MFC set to  500.000000
6/22/2010	3:43:00 AM	H2 MFC set to  0.000000
6/22/2010	3:43:00 AM	BCl3 MFC set to  0.000000
6/22/2010	3:43:00 AM	PHl3 MFC set to  0.000000
6/22/2010	3:43:00 AM	SiCl4 MFC set to  0.000000
6/22/2010	3:43:00 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	3:43:00 AM	Tube furnace set to 0
6/22/2010	3:48:00 AM	Helium valve closed
6/22/2010	3:48:00 AM	H2 valve closed
6/22/2010	3:48:00 AM	BCl3 valve closed
6/22/2010	3:48:00 AM	PH3 valve closed
6/22/2010	3:48:00 AM	SiCl4 pre valve closed
6/22/2010	3:48:00 AM	SiCl4 post valve closed
6/22/2010	3:48:00 AM	Bubbler valve closed
6/22/2010	3:48:00 AM	Main Vac valve opened
6/22/2010	3:48:00 AM	Bypass valve opened
6/22/2010	3:48:00 AM	Helium MFC set to  0.000000
6/22/2010	3:48:00 AM	H2 MFC set to  0.000000
6/22/2010	3:48:00 AM	BCl3 MFC set to  0.000000
6/22/2010	3:48:00 AM	PHl3 MFC set to  0.000000
6/22/2010	3:48:00 AM	SiCl4 MFC set to  0.000000
6/22/2010	3:48:00 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	3:48:01 AM	Tube furnace set to 0
6/22/2010	3:53:01 AM	H2 valve closed
6/22/2010	3:53:01 AM	BCl3 valve closed
6/22/2010	3:53:01 AM	PH3 valve closed
6/22/2010	3:53:01 AM	SiCl4 pre valve closed
6/22/2010	3:53:01 AM	SiCl4 post valve closed
6/22/2010	3:53:01 AM	Bubbler valve closed
6/22/2010	3:53:01 AM	Helium valve opened
6/22/2010	3:53:01 AM	Main Vac valve opened
6/22/2010	3:53:01 AM	Bypass valve opened
6/22/2010	3:53:01 AM	Helium MFC set to  500.000000
6/22/2010	3:53:01 AM	H2 MFC set to  0.000000
6/22/2010	3:53:01 AM	BCl3 MFC set to  0.000000
6/22/2010	3:53:01 AM	PHl3 MFC set to  0.000000
6/22/2010	3:53:01 AM	SiCl4 MFC set to  0.000000
6/22/2010	3:53:01 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	3:53:01 AM	Tube furnace set to 0
6/22/2010	3:58:01 AM	Helium valve closed
6/22/2010	3:58:01 AM	H2 valve closed
6/22/2010	3:58:01 AM	BCl3 valve closed
6/22/2010	3:58:01 AM	PH3 valve closed
6/22/2010	3:58:01 AM	SiCl4 pre valve closed
6/22/2010	3:58:01 AM	SiCl4 post valve closed
6/22/2010	3:58:01 AM	Bubbler valve closed
6/22/2010	3:58:01 AM	Main Vac valve opened
6/22/2010	3:58:01 AM	Bypass valve opened
6/22/2010	3:58:01 AM	Helium MFC set to  0.000000
6/22/2010	3:58:01 AM	H2 MFC set to  0.000000
6/22/2010	3:58:01 AM	BCl3 MFC set to  0.000000
6/22/2010	3:58:01 AM	PHl3 MFC set to  0.000000
6/22/2010	3:58:01 AM	SiCl4 MFC set to  0.000000
6/22/2010	3:58:01 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	3:58:01 AM	Tube furnace set to 0
6/22/2010	4:03:01 AM	Run finished at 4:03 AM
6/22/2010	4:15:17 AM	Helium MFC set to  500.000000
6/22/2010	4:15:18 AM	Helium valve opened
6/22/2010	4:23:51 AM	Helium valve closed
6/22/2010	4:24:35 AM	Bypass valve closed
6/22/2010	4:24:35 AM	Main Vac valve closed
6/22/2010	4:24:47 AM	Bypass valve opened
6/22/2010	4:24:48 AM	Main Vac valve opened
6/22/2010	4:24:57 AM	Recipe started at 4:24 AM
6/22/2010	4:24:57 AM	Helium valve closed
6/22/2010	4:24:57 AM	BCl3 valve closed
6/22/2010	4:24:57 AM	PH3 valve closed
6/22/2010	4:24:57 AM	SiCl4 pre valve closed
6/22/2010	4:24:57 AM	SiCl4 post valve closed
6/22/2010	4:24:57 AM	Main Vac valve closed
6/22/2010	4:24:57 AM	Bypass valve closed
6/22/2010	4:24:57 AM	Bubbler valve closed
6/22/2010	4:24:57 AM	H2 valve opened
6/22/2010	4:24:57 AM	Helium MFC set to  0.000000
6/22/2010	4:24:57 AM	H2 MFC set to  500.000000
6/22/2010	4:24:57 AM	BCl3 MFC set to  0.000000
6/22/2010	4:24:57 AM	PHl3 MFC set to  0.000000
6/22/2010	4:24:57 AM	SiCl4 MFC set to  0.000000
6/22/2010	4:24:57 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	4:24:57 AM	Tube furnace set to 0
6/22/2010	4:26:17 AM	Helium valve closed
6/22/2010	4:26:17 AM	BCl3 valve closed
6/22/2010	4:26:17 AM	PH3 valve closed
6/22/2010	4:26:17 AM	SiCl4 pre valve closed
6/22/2010	4:26:17 AM	SiCl4 post valve closed
6/22/2010	4:26:17 AM	Main Vac valve closed
6/22/2010	4:26:17 AM	Bypass valve closed
6/22/2010	4:26:17 AM	H2 valve opened
6/22/2010	4:26:17 AM	Bubbler valve opened
6/22/2010	4:26:17 AM	Helium MFC set to  0.000000
6/22/2010	4:26:17 AM	H2 MFC set to  500.000000
6/22/2010	4:26:17 AM	BCl3 MFC set to  0.000000
6/22/2010	4:26:17 AM	PHl3 MFC set to  0.000000
6/22/2010	4:26:17 AM	SiCl4 MFC set to  0.000000
6/22/2010	4:26:17 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	4:26:17 AM	Tube furnace set to 1000
6/22/2010	4:46:17 AM	Helium valve closed
6/22/2010	4:46:17 AM	PH3 valve closed
6/22/2010	4:46:17 AM	Main Vac valve closed
6/22/2010	4:46:17 AM	Bypass valve closed
6/22/2010	4:46:17 AM	H2 valve opened
6/22/2010	4:46:17 AM	BCl3 valve opened
6/22/2010	4:46:17 AM	SiCl4 pre valve opened
6/22/2010	4:46:17 AM	SiCl4 post valve opened
6/22/2010	4:46:17 AM	Bubbler valve opened
6/22/2010	4:46:17 AM	Helium MFC set to  0.000000
6/22/2010	4:46:17 AM	H2 MFC set to  500.000000
6/22/2010	4:46:17 AM	BCl3 MFC set to  35.000000
6/22/2010	4:46:17 AM	PHl3 MFC set to  0.000000
6/22/2010	4:46:17 AM	SiCl4 MFC set to  50.000000
6/22/2010	4:46:17 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	4:46:18 AM	Tube furnace set to 1000
6/22/2010	5:01:18 AM	H2 valve closed
6/22/2010	5:01:18 AM	BCl3 valve closed
6/22/2010	5:01:18 AM	PH3 valve closed
6/22/2010	5:01:18 AM	SiCl4 pre valve closed
6/22/2010	5:01:18 AM	SiCl4 post valve closed
6/22/2010	5:01:18 AM	Main Vac valve closed
6/22/2010	5:01:18 AM	Bypass valve closed
6/22/2010	5:01:18 AM	Helium valve opened
6/22/2010	5:01:18 AM	Bubbler valve opened
6/22/2010	5:01:18 AM	Helium MFC set to  500.000000
6/22/2010	5:01:18 AM	H2 MFC set to  0.000000
6/22/2010	5:01:18 AM	BCl3 MFC set to  0.000000
6/22/2010	5:01:18 AM	PHl3 MFC set to  0.000000
6/22/2010	5:01:18 AM	SiCl4 MFC set to  0.000000
6/22/2010	5:01:18 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	5:01:18 AM	Tube furnace set to 750
6/22/2010	5:21:18 AM	H2 valve closed
6/22/2010	5:21:18 AM	BCl3 valve closed
6/22/2010	5:21:18 AM	PH3 valve closed
6/22/2010	5:21:18 AM	SiCl4 pre valve closed
6/22/2010	5:21:18 AM	SiCl4 post valve closed
6/22/2010	5:21:18 AM	Main Vac valve closed
6/22/2010	5:21:18 AM	Bypass valve closed
6/22/2010	5:21:18 AM	Helium valve opened
6/22/2010	5:21:18 AM	Bubbler valve opened
6/22/2010	5:21:18 AM	Helium MFC set to  500.000000
6/22/2010	5:21:18 AM	H2 MFC set to  0.000000
6/22/2010	5:21:18 AM	BCl3 MFC set to  0.000000
6/22/2010	5:21:18 AM	PHl3 MFC set to  0.000000
6/22/2010	5:21:18 AM	SiCl4 MFC set to  0.000000
6/22/2010	5:21:18 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	5:21:18 AM	Tube furnace set to 0
6/22/2010	5:41:18 AM	Helium valve closed
6/22/2010	5:41:18 AM	H2 valve closed
6/22/2010	5:41:18 AM	BCl3 valve closed
6/22/2010	5:41:18 AM	PH3 valve closed
6/22/2010	5:41:18 AM	SiCl4 pre valve closed
6/22/2010	5:41:18 AM	SiCl4 post valve closed
6/22/2010	5:41:18 AM	Main Vac valve closed
6/22/2010	5:41:18 AM	Bypass valve closed
6/22/2010	5:41:18 AM	Bubbler valve closed
6/22/2010	5:41:18 AM	Helium MFC set to  0.000000
6/22/2010	5:41:18 AM	H2 MFC set to  0.000000
6/22/2010	5:41:18 AM	BCl3 MFC set to  0.000000
6/22/2010	5:41:18 AM	PHl3 MFC set to  0.000000
6/22/2010	5:41:18 AM	SiCl4 MFC set to  0.000000
6/22/2010	5:41:18 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	5:41:18 AM	Tube furnace set to 0
6/22/2010	5:41:18 AM	Run finished at 5:41 AM
6/22/2010	5:58:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/22/2010	5:58:46 AM	Recipe started at 5:58 AM
6/22/2010	5:58:46 AM	Helium valve closed
6/22/2010	5:58:46 AM	H2 valve closed
6/22/2010	5:58:46 AM	BCl3 valve closed
6/22/2010	5:58:46 AM	PH3 valve closed
6/22/2010	5:58:46 AM	SiCl4 pre valve closed
6/22/2010	5:58:46 AM	SiCl4 post valve closed
6/22/2010	5:58:46 AM	Main Vac valve closed
6/22/2010	5:58:46 AM	Bubbler valve closed
6/22/2010	5:58:46 AM	Bypass valve opened
6/22/2010	5:58:46 AM	Helium MFC set to  0.000000
6/22/2010	5:58:46 AM	H2 MFC set to  0.000000
6/22/2010	5:58:46 AM	BCl3 MFC set to  0.000000
6/22/2010	5:58:46 AM	PHl3 MFC set to  0.000000
6/22/2010	5:58:46 AM	SiCl4 MFC set to  0.000000
6/22/2010	5:58:46 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	5:58:46 AM	Tube furnace set to 0
6/22/2010	5:59:34 AM	Helium valve closed
6/22/2010	5:59:34 AM	H2 valve closed
6/22/2010	5:59:34 AM	BCl3 valve closed
6/22/2010	5:59:34 AM	PH3 valve closed
6/22/2010	5:59:34 AM	SiCl4 pre valve closed
6/22/2010	5:59:34 AM	SiCl4 post valve closed
6/22/2010	5:59:34 AM	Bubbler valve closed
6/22/2010	5:59:34 AM	Main Vac valve opened
6/22/2010	5:59:34 AM	Bypass valve opened
6/22/2010	5:59:34 AM	Helium MFC set to  0.000000
6/22/2010	5:59:34 AM	H2 MFC set to  0.000000
6/22/2010	5:59:34 AM	BCl3 MFC set to  0.000000
6/22/2010	5:59:34 AM	PHl3 MFC set to  0.000000
6/22/2010	5:59:34 AM	SiCl4 MFC set to  0.000000
6/22/2010	5:59:34 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	5:59:34 AM	Tube furnace set to 0
6/22/2010	5:59:34 AM	Run finished at 5:59 AM
6/22/2010	5:59:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/22/2010	6:00:44 AM	Recipe started at 6:00 AM
6/22/2010	6:00:44 AM	H2 valve closed
6/22/2010	6:00:44 AM	BCl3 valve closed
6/22/2010	6:00:44 AM	PH3 valve closed
6/22/2010	6:00:44 AM	SiCl4 pre valve closed
6/22/2010	6:00:44 AM	SiCl4 post valve closed
6/22/2010	6:00:44 AM	Main Vac valve closed
6/22/2010	6:00:44 AM	Bypass valve closed
6/22/2010	6:00:44 AM	Bubbler valve closed
6/22/2010	6:00:44 AM	Helium valve opened
6/22/2010	6:00:44 AM	Helium MFC set to  500.000000
6/22/2010	6:00:44 AM	H2 MFC set to  0.000000
6/22/2010	6:00:44 AM	BCl3 MFC set to  0.000000
6/22/2010	6:00:44 AM	PHl3 MFC set to  0.000000
6/22/2010	6:00:44 AM	SiCl4 MFC set to  0.000000
6/22/2010	6:00:44 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	6:00:44 AM	Tube furnace set to 0
6/22/2010	6:02:03 AM	Helium valve closed
6/22/2010	6:02:03 AM	H2 valve closed
6/22/2010	6:02:03 AM	BCl3 valve closed
6/22/2010	6:02:03 AM	PH3 valve closed
6/22/2010	6:02:03 AM	SiCl4 pre valve closed
6/22/2010	6:02:03 AM	SiCl4 post valve closed
6/22/2010	6:02:03 AM	Main Vac valve closed
6/22/2010	6:02:03 AM	Bypass valve closed
6/22/2010	6:02:03 AM	Bubbler valve closed
6/22/2010	6:02:03 AM	Helium MFC set to  0.000000
6/22/2010	6:02:03 AM	H2 MFC set to  0.000000
6/22/2010	6:02:03 AM	BCl3 MFC set to  0.000000
6/22/2010	6:02:03 AM	PHl3 MFC set to  0.000000
6/22/2010	6:02:03 AM	SiCl4 MFC set to  0.000000
6/22/2010	6:02:03 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	6:02:04 AM	Tube furnace set to 0
6/22/2010	6:02:19 AM	Helium valve closed
6/22/2010	6:02:19 AM	H2 valve closed
6/22/2010	6:02:19 AM	BCl3 valve closed
6/22/2010	6:02:19 AM	PH3 valve closed
6/22/2010	6:02:19 AM	SiCl4 pre valve closed
6/22/2010	6:02:19 AM	SiCl4 post valve closed
6/22/2010	6:02:19 AM	Main Vac valve closed
6/22/2010	6:02:19 AM	Bubbler valve closed
6/22/2010	6:02:19 AM	Bypass valve opened
6/22/2010	6:02:19 AM	Helium MFC set to  0.000000
6/22/2010	6:02:19 AM	H2 MFC set to  0.000000
6/22/2010	6:02:19 AM	BCl3 MFC set to  0.000000
6/22/2010	6:02:19 AM	PHl3 MFC set to  0.000000
6/22/2010	6:02:19 AM	SiCl4 MFC set to  0.000000
6/22/2010	6:02:19 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	6:02:19 AM	Tube furnace set to 0
6/22/2010	6:02:51 AM	Helium valve closed
6/22/2010	6:02:51 AM	H2 valve closed
6/22/2010	6:02:51 AM	BCl3 valve closed
6/22/2010	6:02:51 AM	PH3 valve closed
6/22/2010	6:02:51 AM	SiCl4 pre valve closed
6/22/2010	6:02:52 AM	SiCl4 post valve closed
6/22/2010	6:02:52 AM	Bubbler valve closed
6/22/2010	6:02:52 AM	Main Vac valve opened
6/22/2010	6:02:52 AM	Bypass valve opened
6/22/2010	6:02:52 AM	Helium MFC set to  0.000000
6/22/2010	6:02:52 AM	H2 MFC set to  0.000000
6/22/2010	6:02:52 AM	BCl3 MFC set to  0.000000
6/22/2010	6:02:52 AM	PHl3 MFC set to  0.000000
6/22/2010	6:02:52 AM	SiCl4 MFC set to  0.000000
6/22/2010	6:02:52 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	6:02:52 AM	Tube furnace set to 0
6/22/2010	6:07:52 AM	H2 valve closed
6/22/2010	6:07:52 AM	BCl3 valve closed
6/22/2010	6:07:52 AM	PH3 valve closed
6/22/2010	6:07:52 AM	SiCl4 pre valve closed
6/22/2010	6:07:52 AM	SiCl4 post valve closed
6/22/2010	6:07:52 AM	Main Vac valve closed
6/22/2010	6:07:52 AM	Bypass valve closed
6/22/2010	6:07:52 AM	Bubbler valve closed
6/22/2010	6:07:52 AM	Helium valve opened
6/22/2010	6:07:52 AM	Helium MFC set to  500.000000
6/22/2010	6:07:52 AM	H2 MFC set to  0.000000
6/22/2010	6:07:52 AM	BCl3 MFC set to  0.000000
6/22/2010	6:07:52 AM	PHl3 MFC set to  0.000000
6/22/2010	6:07:52 AM	SiCl4 MFC set to  0.000000
6/22/2010	6:07:52 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	6:07:52 AM	Tube furnace set to 0
6/22/2010	6:09:10 AM	Helium valve closed
6/22/2010	6:09:10 AM	H2 valve closed
6/22/2010	6:09:10 AM	BCl3 valve closed
6/22/2010	6:09:10 AM	PH3 valve closed
6/22/2010	6:09:10 AM	SiCl4 pre valve closed
6/22/2010	6:09:10 AM	SiCl4 post valve closed
6/22/2010	6:09:10 AM	Main Vac valve closed
6/22/2010	6:09:10 AM	Bypass valve closed
6/22/2010	6:09:10 AM	Bubbler valve closed
6/22/2010	6:09:10 AM	Helium MFC set to  0.000000
6/22/2010	6:09:10 AM	H2 MFC set to  0.000000
6/22/2010	6:09:10 AM	BCl3 MFC set to  0.000000
6/22/2010	6:09:10 AM	PHl3 MFC set to  0.000000
6/22/2010	6:09:10 AM	SiCl4 MFC set to  0.000000
6/22/2010	6:09:10 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	6:09:11 AM	Tube furnace set to 0
6/22/2010	6:09:26 AM	Helium valve closed
6/22/2010	6:09:26 AM	H2 valve closed
6/22/2010	6:09:26 AM	BCl3 valve closed
6/22/2010	6:09:26 AM	PH3 valve closed
6/22/2010	6:09:26 AM	SiCl4 pre valve closed
6/22/2010	6:09:26 AM	SiCl4 post valve closed
6/22/2010	6:09:26 AM	Main Vac valve closed
6/22/2010	6:09:26 AM	Bubbler valve closed
6/22/2010	6:09:26 AM	Bypass valve opened
6/22/2010	6:09:26 AM	Helium MFC set to  0.000000
6/22/2010	6:09:26 AM	H2 MFC set to  0.000000
6/22/2010	6:09:26 AM	BCl3 MFC set to  0.000000
6/22/2010	6:09:26 AM	PHl3 MFC set to  0.000000
6/22/2010	6:09:26 AM	SiCl4 MFC set to  0.000000
6/22/2010	6:09:26 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	6:09:26 AM	Tube furnace set to 0
6/22/2010	6:09:58 AM	Helium valve closed
6/22/2010	6:09:58 AM	H2 valve closed
6/22/2010	6:09:58 AM	BCl3 valve closed
6/22/2010	6:09:58 AM	PH3 valve closed
6/22/2010	6:09:58 AM	SiCl4 pre valve closed
6/22/2010	6:09:58 AM	SiCl4 post valve closed
6/22/2010	6:09:58 AM	Bubbler valve closed
6/22/2010	6:09:58 AM	Main Vac valve opened
6/22/2010	6:09:58 AM	Bypass valve opened
6/22/2010	6:09:58 AM	Helium MFC set to  0.000000
6/22/2010	6:09:58 AM	H2 MFC set to  0.000000
6/22/2010	6:09:58 AM	BCl3 MFC set to  0.000000
6/22/2010	6:09:58 AM	PHl3 MFC set to  0.000000
6/22/2010	6:09:58 AM	SiCl4 MFC set to  0.000000
6/22/2010	6:09:58 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	6:09:58 AM	Tube furnace set to 0
6/22/2010	6:14:58 AM	H2 valve closed
6/22/2010	6:14:58 AM	BCl3 valve closed
6/22/2010	6:14:58 AM	PH3 valve closed
6/22/2010	6:14:58 AM	SiCl4 pre valve closed
6/22/2010	6:14:58 AM	SiCl4 post valve closed
6/22/2010	6:14:58 AM	Main Vac valve closed
6/22/2010	6:14:58 AM	Bypass valve closed
6/22/2010	6:14:58 AM	Bubbler valve closed
6/22/2010	6:14:58 AM	Helium valve opened
6/22/2010	6:14:58 AM	Helium MFC set to  500.000000
6/22/2010	6:14:58 AM	H2 MFC set to  0.000000
6/22/2010	6:14:58 AM	BCl3 MFC set to  0.000000
6/22/2010	6:14:58 AM	PHl3 MFC set to  0.000000
6/22/2010	6:14:58 AM	SiCl4 MFC set to  0.000000
6/22/2010	6:14:58 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	6:14:59 AM	Tube furnace set to 0
6/22/2010	6:16:17 AM	Helium valve closed
6/22/2010	6:16:17 AM	H2 valve closed
6/22/2010	6:16:17 AM	BCl3 valve closed
6/22/2010	6:16:17 AM	PH3 valve closed
6/22/2010	6:16:17 AM	SiCl4 pre valve closed
6/22/2010	6:16:17 AM	SiCl4 post valve closed
6/22/2010	6:16:17 AM	Main Vac valve closed
6/22/2010	6:16:17 AM	Bypass valve closed
6/22/2010	6:16:17 AM	Bubbler valve closed
6/22/2010	6:16:17 AM	Helium MFC set to  0.000000
6/22/2010	6:16:17 AM	H2 MFC set to  0.000000
6/22/2010	6:16:17 AM	BCl3 MFC set to  0.000000
6/22/2010	6:16:17 AM	PHl3 MFC set to  0.000000
6/22/2010	6:16:17 AM	SiCl4 MFC set to  0.000000
6/22/2010	6:16:17 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	6:16:17 AM	Tube furnace set to 0
6/22/2010	6:16:32 AM	Helium valve closed
6/22/2010	6:16:32 AM	H2 valve closed
6/22/2010	6:16:32 AM	BCl3 valve closed
6/22/2010	6:16:32 AM	PH3 valve closed
6/22/2010	6:16:32 AM	SiCl4 pre valve closed
6/22/2010	6:16:32 AM	SiCl4 post valve closed
6/22/2010	6:16:32 AM	Main Vac valve closed
6/22/2010	6:16:32 AM	Bubbler valve closed
6/22/2010	6:16:32 AM	Bypass valve opened
6/22/2010	6:16:32 AM	Helium MFC set to  0.000000
6/22/2010	6:16:32 AM	H2 MFC set to  0.000000
6/22/2010	6:16:32 AM	BCl3 MFC set to  0.000000
6/22/2010	6:16:32 AM	PHl3 MFC set to  0.000000
6/22/2010	6:16:32 AM	SiCl4 MFC set to  0.000000
6/22/2010	6:16:32 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	6:16:32 AM	Tube furnace set to 0
6/22/2010	6:17:05 AM	Helium valve closed
6/22/2010	6:17:05 AM	H2 valve closed
6/22/2010	6:17:05 AM	BCl3 valve closed
6/22/2010	6:17:05 AM	PH3 valve closed
6/22/2010	6:17:05 AM	SiCl4 pre valve closed
6/22/2010	6:17:05 AM	SiCl4 post valve closed
6/22/2010	6:17:05 AM	Bubbler valve closed
6/22/2010	6:17:05 AM	Main Vac valve opened
6/22/2010	6:17:05 AM	Bypass valve opened
6/22/2010	6:17:05 AM	Helium MFC set to  0.000000
6/22/2010	6:17:05 AM	H2 MFC set to  0.000000
6/22/2010	6:17:05 AM	BCl3 MFC set to  0.000000
6/22/2010	6:17:05 AM	PHl3 MFC set to  0.000000
6/22/2010	6:17:05 AM	SiCl4 MFC set to  0.000000
6/22/2010	6:17:05 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	6:17:05 AM	Tube furnace set to 0
6/22/2010	6:22:05 AM	H2 valve closed
6/22/2010	6:22:05 AM	BCl3 valve closed
6/22/2010	6:22:05 AM	PH3 valve closed
6/22/2010	6:22:05 AM	SiCl4 pre valve closed
6/22/2010	6:22:05 AM	SiCl4 post valve closed
6/22/2010	6:22:05 AM	Bubbler valve closed
6/22/2010	6:22:05 AM	Helium valve opened
6/22/2010	6:22:05 AM	Main Vac valve opened
6/22/2010	6:22:05 AM	Bypass valve opened
6/22/2010	6:22:05 AM	Helium MFC set to  500.000000
6/22/2010	6:22:05 AM	H2 MFC set to  0.000000
6/22/2010	6:22:05 AM	BCl3 MFC set to  0.000000
6/22/2010	6:22:05 AM	PHl3 MFC set to  0.000000
6/22/2010	6:22:05 AM	SiCl4 MFC set to  0.000000
6/22/2010	6:22:05 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	6:22:05 AM	Tube furnace set to 0
6/22/2010	6:27:05 AM	Helium valve closed
6/22/2010	6:27:05 AM	H2 valve closed
6/22/2010	6:27:05 AM	BCl3 valve closed
6/22/2010	6:27:05 AM	PH3 valve closed
6/22/2010	6:27:05 AM	SiCl4 pre valve closed
6/22/2010	6:27:05 AM	SiCl4 post valve closed
6/22/2010	6:27:05 AM	Bubbler valve closed
6/22/2010	6:27:05 AM	Main Vac valve opened
6/22/2010	6:27:05 AM	Bypass valve opened
6/22/2010	6:27:05 AM	Helium MFC set to  0.000000
6/22/2010	6:27:05 AM	H2 MFC set to  0.000000
6/22/2010	6:27:05 AM	BCl3 MFC set to  0.000000
6/22/2010	6:27:05 AM	PHl3 MFC set to  0.000000
6/22/2010	6:27:05 AM	SiCl4 MFC set to  0.000000
6/22/2010	6:27:05 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	6:27:05 AM	Tube furnace set to 0
6/22/2010	6:32:05 AM	H2 valve closed
6/22/2010	6:32:05 AM	BCl3 valve closed
6/22/2010	6:32:05 AM	PH3 valve closed
6/22/2010	6:32:05 AM	SiCl4 pre valve closed
6/22/2010	6:32:05 AM	SiCl4 post valve closed
6/22/2010	6:32:05 AM	Bubbler valve closed
6/22/2010	6:32:05 AM	Helium valve opened
6/22/2010	6:32:05 AM	Main Vac valve opened
6/22/2010	6:32:05 AM	Bypass valve opened
6/22/2010	6:32:05 AM	Helium MFC set to  500.000000
6/22/2010	6:32:05 AM	H2 MFC set to  0.000000
6/22/2010	6:32:05 AM	BCl3 MFC set to  0.000000
6/22/2010	6:32:05 AM	PHl3 MFC set to  0.000000
6/22/2010	6:32:05 AM	SiCl4 MFC set to  0.000000
6/22/2010	6:32:05 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	6:32:05 AM	Tube furnace set to 0
6/22/2010	6:37:05 AM	Helium valve closed
6/22/2010	6:37:05 AM	H2 valve closed
6/22/2010	6:37:05 AM	BCl3 valve closed
6/22/2010	6:37:05 AM	PH3 valve closed
6/22/2010	6:37:05 AM	SiCl4 pre valve closed
6/22/2010	6:37:05 AM	SiCl4 post valve closed
6/22/2010	6:37:05 AM	Bubbler valve closed
6/22/2010	6:37:05 AM	Main Vac valve opened
6/22/2010	6:37:05 AM	Bypass valve opened
6/22/2010	6:37:05 AM	Helium MFC set to  0.000000
6/22/2010	6:37:05 AM	H2 MFC set to  0.000000
6/22/2010	6:37:05 AM	BCl3 MFC set to  0.000000
6/22/2010	6:37:05 AM	PHl3 MFC set to  0.000000
6/22/2010	6:37:05 AM	SiCl4 MFC set to  0.000000
6/22/2010	6:37:05 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	6:37:06 AM	Tube furnace set to 0
6/22/2010	6:42:06 AM	H2 valve closed
6/22/2010	6:42:06 AM	BCl3 valve closed
6/22/2010	6:42:06 AM	PH3 valve closed
6/22/2010	6:42:06 AM	SiCl4 pre valve closed
6/22/2010	6:42:06 AM	SiCl4 post valve closed
6/22/2010	6:42:06 AM	Bubbler valve closed
6/22/2010	6:42:06 AM	Helium valve opened
6/22/2010	6:42:06 AM	Main Vac valve opened
6/22/2010	6:42:06 AM	Bypass valve opened
6/22/2010	6:42:06 AM	Helium MFC set to  500.000000
6/22/2010	6:42:06 AM	H2 MFC set to  0.000000
6/22/2010	6:42:06 AM	BCl3 MFC set to  0.000000
6/22/2010	6:42:06 AM	PHl3 MFC set to  0.000000
6/22/2010	6:42:06 AM	SiCl4 MFC set to  0.000000
6/22/2010	6:42:06 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	6:42:06 AM	Tube furnace set to 0
6/22/2010	6:47:06 AM	Helium valve closed
6/22/2010	6:47:06 AM	H2 valve closed
6/22/2010	6:47:06 AM	BCl3 valve closed
6/22/2010	6:47:06 AM	PH3 valve closed
6/22/2010	6:47:06 AM	SiCl4 pre valve closed
6/22/2010	6:47:06 AM	SiCl4 post valve closed
6/22/2010	6:47:06 AM	Bubbler valve closed
6/22/2010	6:47:06 AM	Main Vac valve opened
6/22/2010	6:47:06 AM	Bypass valve opened
6/22/2010	6:47:06 AM	Helium MFC set to  0.000000
6/22/2010	6:47:06 AM	H2 MFC set to  0.000000
6/22/2010	6:47:06 AM	BCl3 MFC set to  0.000000
6/22/2010	6:47:06 AM	PHl3 MFC set to  0.000000
6/22/2010	6:47:06 AM	SiCl4 MFC set to  0.000000
6/22/2010	6:47:06 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	6:47:06 AM	Tube furnace set to 0
6/22/2010	6:52:06 AM	H2 valve closed
6/22/2010	6:52:06 AM	BCl3 valve closed
6/22/2010	6:52:06 AM	PH3 valve closed
6/22/2010	6:52:06 AM	SiCl4 pre valve closed
6/22/2010	6:52:06 AM	SiCl4 post valve closed
6/22/2010	6:52:06 AM	Bubbler valve closed
6/22/2010	6:52:06 AM	Helium valve opened
6/22/2010	6:52:06 AM	Main Vac valve opened
6/22/2010	6:52:06 AM	Bypass valve opened
6/22/2010	6:52:06 AM	Helium MFC set to  500.000000
6/22/2010	6:52:06 AM	H2 MFC set to  0.000000
6/22/2010	6:52:06 AM	BCl3 MFC set to  0.000000
6/22/2010	6:52:06 AM	PHl3 MFC set to  0.000000
6/22/2010	6:52:06 AM	SiCl4 MFC set to  0.000000
6/22/2010	6:52:06 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	6:52:06 AM	Tube furnace set to 0
6/22/2010	6:57:06 AM	Helium valve closed
6/22/2010	6:57:06 AM	H2 valve closed
6/22/2010	6:57:06 AM	BCl3 valve closed
6/22/2010	6:57:06 AM	PH3 valve closed
6/22/2010	6:57:06 AM	SiCl4 pre valve closed
6/22/2010	6:57:06 AM	SiCl4 post valve closed
6/22/2010	6:57:06 AM	Bubbler valve closed
6/22/2010	6:57:06 AM	Main Vac valve opened
6/22/2010	6:57:06 AM	Bypass valve opened
6/22/2010	6:57:06 AM	Helium MFC set to  0.000000
6/22/2010	6:57:06 AM	H2 MFC set to  0.000000
6/22/2010	6:57:06 AM	BCl3 MFC set to  0.000000
6/22/2010	6:57:06 AM	PHl3 MFC set to  0.000000
6/22/2010	6:57:06 AM	SiCl4 MFC set to  0.000000
6/22/2010	6:57:06 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	6:57:06 AM	Tube furnace set to 0
6/22/2010	7:02:06 AM	H2 valve closed
6/22/2010	7:02:06 AM	BCl3 valve closed
6/22/2010	7:02:06 AM	PH3 valve closed
6/22/2010	7:02:06 AM	SiCl4 pre valve closed
6/22/2010	7:02:06 AM	SiCl4 post valve closed
6/22/2010	7:02:06 AM	Bubbler valve closed
6/22/2010	7:02:06 AM	Helium valve opened
6/22/2010	7:02:06 AM	Main Vac valve opened
6/22/2010	7:02:06 AM	Bypass valve opened
6/22/2010	7:02:06 AM	Helium MFC set to  500.000000
6/22/2010	7:02:06 AM	H2 MFC set to  0.000000
6/22/2010	7:02:06 AM	BCl3 MFC set to  0.000000
6/22/2010	7:02:06 AM	PHl3 MFC set to  0.000000
6/22/2010	7:02:06 AM	SiCl4 MFC set to  0.000000
6/22/2010	7:02:06 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	7:02:07 AM	Tube furnace set to 0
6/22/2010	7:07:07 AM	Helium valve closed
6/22/2010	7:07:07 AM	H2 valve closed
6/22/2010	7:07:07 AM	BCl3 valve closed
6/22/2010	7:07:07 AM	PH3 valve closed
6/22/2010	7:07:07 AM	SiCl4 pre valve closed
6/22/2010	7:07:07 AM	SiCl4 post valve closed
6/22/2010	7:07:07 AM	Bubbler valve closed
6/22/2010	7:07:07 AM	Main Vac valve opened
6/22/2010	7:07:07 AM	Bypass valve opened
6/22/2010	7:07:07 AM	Helium MFC set to  0.000000
6/22/2010	7:07:07 AM	H2 MFC set to  0.000000
6/22/2010	7:07:07 AM	BCl3 MFC set to  0.000000
6/22/2010	7:07:07 AM	PHl3 MFC set to  0.000000
6/22/2010	7:07:07 AM	SiCl4 MFC set to  0.000000
6/22/2010	7:07:07 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	7:07:07 AM	Tube furnace set to 0
6/22/2010	7:12:07 AM	Run finished at 7:12 AM
6/22/2010	7:13:43 AM	Bypass valve closed
6/22/2010	7:13:43 AM	Main Vac valve closed
6/22/2010	7:13:51 AM	Bypass valve opened
6/22/2010	7:13:51 AM	Main Vac valve opened
6/22/2010	7:14:02 AM	Helium MFC set to  500.000000
6/22/2010	7:14:04 AM	Helium valve opened
6/22/2010	7:18:37 AM	Helium valve closed
6/22/2010	7:19:30 AM	Recipe started at 7:19 AM
6/22/2010	7:19:30 AM	Helium valve closed
6/22/2010	7:19:30 AM	BCl3 valve closed
6/22/2010	7:19:30 AM	PH3 valve closed
6/22/2010	7:19:30 AM	SiCl4 pre valve closed
6/22/2010	7:19:30 AM	SiCl4 post valve closed
6/22/2010	7:19:30 AM	Main Vac valve closed
6/22/2010	7:19:30 AM	Bypass valve closed
6/22/2010	7:19:30 AM	Bubbler valve closed
6/22/2010	7:19:30 AM	H2 valve opened
6/22/2010	7:19:30 AM	Helium MFC set to  0.000000
6/22/2010	7:19:30 AM	H2 MFC set to  500.000000
6/22/2010	7:19:30 AM	BCl3 MFC set to  0.000000
6/22/2010	7:19:30 AM	PHl3 MFC set to  0.000000
6/22/2010	7:19:30 AM	SiCl4 MFC set to  0.000000
6/22/2010	7:19:30 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	7:19:30 AM	Tube furnace set to 0
6/22/2010	7:20:50 AM	Helium valve closed
6/22/2010	7:20:50 AM	BCl3 valve closed
6/22/2010	7:20:50 AM	PH3 valve closed
6/22/2010	7:20:50 AM	SiCl4 pre valve closed
6/22/2010	7:20:50 AM	SiCl4 post valve closed
6/22/2010	7:20:50 AM	Main Vac valve closed
6/22/2010	7:20:50 AM	Bypass valve closed
6/22/2010	7:20:50 AM	H2 valve opened
6/22/2010	7:20:50 AM	Bubbler valve opened
6/22/2010	7:20:50 AM	Helium MFC set to  0.000000
6/22/2010	7:20:50 AM	H2 MFC set to  500.000000
6/22/2010	7:20:50 AM	BCl3 MFC set to  0.000000
6/22/2010	7:20:50 AM	PHl3 MFC set to  0.000000
6/22/2010	7:20:50 AM	SiCl4 MFC set to  0.000000
6/22/2010	7:20:50 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	7:20:50 AM	Tube furnace set to 1000
6/22/2010	7:40:50 AM	Helium valve closed
6/22/2010	7:40:50 AM	PH3 valve closed
6/22/2010	7:40:50 AM	Main Vac valve closed
6/22/2010	7:40:50 AM	Bypass valve closed
6/22/2010	7:40:50 AM	H2 valve opened
6/22/2010	7:40:50 AM	BCl3 valve opened
6/22/2010	7:40:50 AM	SiCl4 pre valve opened
6/22/2010	7:40:50 AM	SiCl4 post valve opened
6/22/2010	7:40:50 AM	Bubbler valve opened
6/22/2010	7:40:50 AM	Helium MFC set to  0.000000
6/22/2010	7:40:50 AM	H2 MFC set to  500.000000
6/22/2010	7:40:50 AM	BCl3 MFC set to  35.000000
6/22/2010	7:40:50 AM	PHl3 MFC set to  0.000000
6/22/2010	7:40:50 AM	SiCl4 MFC set to  50.000000
6/22/2010	7:40:50 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	7:40:51 AM	Tube furnace set to 1000
6/22/2010	7:55:51 AM	H2 valve closed
6/22/2010	7:55:51 AM	BCl3 valve closed
6/22/2010	7:55:51 AM	PH3 valve closed
6/22/2010	7:55:51 AM	SiCl4 pre valve closed
6/22/2010	7:55:51 AM	SiCl4 post valve closed
6/22/2010	7:55:51 AM	Main Vac valve closed
6/22/2010	7:55:51 AM	Bypass valve closed
6/22/2010	7:55:51 AM	Helium valve opened
6/22/2010	7:55:51 AM	Bubbler valve opened
6/22/2010	7:55:51 AM	Helium MFC set to  500.000000
6/22/2010	7:55:51 AM	H2 MFC set to  0.000000
6/22/2010	7:55:51 AM	BCl3 MFC set to  0.000000
6/22/2010	7:55:51 AM	PHl3 MFC set to  0.000000
6/22/2010	7:55:51 AM	SiCl4 MFC set to  0.000000
6/22/2010	7:55:51 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	7:55:51 AM	Tube furnace set to 750
6/22/2010	8:15:51 AM	H2 valve closed
6/22/2010	8:15:51 AM	BCl3 valve closed
6/22/2010	8:15:51 AM	PH3 valve closed
6/22/2010	8:15:51 AM	SiCl4 pre valve closed
6/22/2010	8:15:51 AM	SiCl4 post valve closed
6/22/2010	8:15:51 AM	Main Vac valve closed
6/22/2010	8:15:51 AM	Bypass valve closed
6/22/2010	8:15:51 AM	Helium valve opened
6/22/2010	8:15:51 AM	Bubbler valve opened
6/22/2010	8:15:51 AM	Helium MFC set to  500.000000
6/22/2010	8:15:51 AM	H2 MFC set to  0.000000
6/22/2010	8:15:51 AM	BCl3 MFC set to  0.000000
6/22/2010	8:15:51 AM	PHl3 MFC set to  0.000000
6/22/2010	8:15:51 AM	SiCl4 MFC set to  0.000000
6/22/2010	8:15:51 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	8:15:51 AM	Tube furnace set to 0
6/22/2010	8:35:51 AM	Helium valve closed
6/22/2010	8:35:51 AM	H2 valve closed
6/22/2010	8:35:51 AM	BCl3 valve closed
6/22/2010	8:35:51 AM	PH3 valve closed
6/22/2010	8:35:51 AM	SiCl4 pre valve closed
6/22/2010	8:35:51 AM	SiCl4 post valve closed
6/22/2010	8:35:51 AM	Main Vac valve closed
6/22/2010	8:35:51 AM	Bypass valve closed
6/22/2010	8:35:51 AM	Bubbler valve closed
6/22/2010	8:35:51 AM	Helium MFC set to  0.000000
6/22/2010	8:35:51 AM	H2 MFC set to  0.000000
6/22/2010	8:35:51 AM	BCl3 MFC set to  0.000000
6/22/2010	8:35:51 AM	PHl3 MFC set to  0.000000
6/22/2010	8:35:51 AM	SiCl4 MFC set to  0.000000
6/22/2010	8:35:51 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	8:35:51 AM	Tube furnace set to 0
6/22/2010	8:35:51 AM	Run finished at 8:35 AM
6/22/2010	9:11:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/22/2010	9:11:52 AM	Recipe started at 9:11 AM
6/22/2010	9:11:52 AM	H2 valve closed
6/22/2010	9:11:52 AM	BCl3 valve closed
6/22/2010	9:11:52 AM	PH3 valve closed
6/22/2010	9:11:52 AM	SiCl4 pre valve closed
6/22/2010	9:11:52 AM	SiCl4 post valve closed
6/22/2010	9:11:52 AM	Main Vac valve closed
6/22/2010	9:11:52 AM	Bypass valve closed
6/22/2010	9:11:52 AM	Bubbler valve closed
6/22/2010	9:11:52 AM	Helium valve opened
6/22/2010	9:11:52 AM	Helium MFC set to  500.000000
6/22/2010	9:11:52 AM	H2 MFC set to  0.000000
6/22/2010	9:11:52 AM	BCl3 MFC set to  0.000000
6/22/2010	9:11:52 AM	PHl3 MFC set to  0.000000
6/22/2010	9:11:52 AM	SiCl4 MFC set to  0.000000
6/22/2010	9:11:52 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	9:11:52 AM	Tube furnace set to 0
6/22/2010	9:11:52 AM	Helium valve closed
6/22/2010	9:11:52 AM	H2 valve closed
6/22/2010	9:11:52 AM	BCl3 valve closed
6/22/2010	9:11:52 AM	PH3 valve closed
6/22/2010	9:11:52 AM	SiCl4 pre valve closed
6/22/2010	9:11:52 AM	SiCl4 post valve closed
6/22/2010	9:11:52 AM	Main Vac valve closed
6/22/2010	9:11:52 AM	Bypass valve closed
6/22/2010	9:11:52 AM	Bubbler valve closed
6/22/2010	9:11:52 AM	Helium MFC set to  0.000000
6/22/2010	9:11:52 AM	H2 MFC set to  0.000000
6/22/2010	9:11:52 AM	BCl3 MFC set to  0.000000
6/22/2010	9:11:52 AM	PHl3 MFC set to  0.000000
6/22/2010	9:11:52 AM	SiCl4 MFC set to  0.000000
6/22/2010	9:11:52 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	9:11:53 AM	Tube furnace set to 0
6/22/2010	9:11:53 AM	Run finished at 9:11 AM
6/22/2010	9:11:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/22/2010	9:28:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/22/2010	9:28:45 AM	Recipe started at 9:28 AM
6/22/2010	9:28:45 AM	H2 valve closed
6/22/2010	9:28:45 AM	BCl3 valve closed
6/22/2010	9:28:45 AM	PH3 valve closed
6/22/2010	9:28:45 AM	SiCl4 pre valve closed
6/22/2010	9:28:45 AM	SiCl4 post valve closed
6/22/2010	9:28:45 AM	Main Vac valve closed
6/22/2010	9:28:45 AM	Bypass valve closed
6/22/2010	9:28:45 AM	Bubbler valve closed
6/22/2010	9:28:45 AM	Helium valve opened
6/22/2010	9:28:45 AM	Helium MFC set to  500.000000
6/22/2010	9:28:45 AM	H2 MFC set to  0.000000
6/22/2010	9:28:45 AM	BCl3 MFC set to  0.000000
6/22/2010	9:28:45 AM	PHl3 MFC set to  0.000000
6/22/2010	9:28:45 AM	SiCl4 MFC set to  0.000000
6/22/2010	9:28:45 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	9:28:46 AM	Tube furnace set to 0
6/22/2010	9:28:52 AM	Helium valve closed
6/22/2010	9:28:52 AM	H2 valve closed
6/22/2010	9:28:52 AM	BCl3 valve closed
6/22/2010	9:28:52 AM	PH3 valve closed
6/22/2010	9:28:52 AM	SiCl4 pre valve closed
6/22/2010	9:28:52 AM	SiCl4 post valve closed
6/22/2010	9:28:52 AM	Main Vac valve closed
6/22/2010	9:28:52 AM	Bypass valve closed
6/22/2010	9:28:52 AM	Bubbler valve closed
6/22/2010	9:28:52 AM	Helium MFC set to  0.000000
6/22/2010	9:28:52 AM	H2 MFC set to  0.000000
6/22/2010	9:28:52 AM	BCl3 MFC set to  0.000000
6/22/2010	9:28:52 AM	PHl3 MFC set to  0.000000
6/22/2010	9:28:52 AM	SiCl4 MFC set to  0.000000
6/22/2010	9:28:52 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	9:28:52 AM	Tube furnace set to 0
6/22/2010	9:28:52 AM	Run finished at 9:28 AM
6/22/2010	9:28:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/22/2010	9:46:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/22/2010	9:46:21 AM	Recipe started at 9:46 AM
6/22/2010	9:46:21 AM	H2 valve closed
6/22/2010	9:46:21 AM	BCl3 valve closed
6/22/2010	9:46:21 AM	PH3 valve closed
6/22/2010	9:46:21 AM	SiCl4 pre valve closed
6/22/2010	9:46:21 AM	SiCl4 post valve closed
6/22/2010	9:46:21 AM	Main Vac valve closed
6/22/2010	9:46:21 AM	Bypass valve closed
6/22/2010	9:46:21 AM	Bubbler valve closed
6/22/2010	9:46:21 AM	Helium valve opened
6/22/2010	9:46:21 AM	Helium MFC set to  500.000000
6/22/2010	9:46:21 AM	H2 MFC set to  0.000000
6/22/2010	9:46:21 AM	BCl3 MFC set to  0.000000
6/22/2010	9:46:21 AM	PHl3 MFC set to  0.000000
6/22/2010	9:46:21 AM	SiCl4 MFC set to  0.000000
6/22/2010	9:46:21 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	9:46:21 AM	Tube furnace set to 0
6/22/2010	9:46:22 AM	Helium valve closed
6/22/2010	9:46:22 AM	H2 valve closed
6/22/2010	9:46:22 AM	BCl3 valve closed
6/22/2010	9:46:22 AM	PH3 valve closed
6/22/2010	9:46:22 AM	SiCl4 pre valve closed
6/22/2010	9:46:22 AM	SiCl4 post valve closed
6/22/2010	9:46:22 AM	Main Vac valve closed
6/22/2010	9:46:22 AM	Bypass valve closed
6/22/2010	9:46:22 AM	Bubbler valve closed
6/22/2010	9:46:22 AM	Helium MFC set to  0.000000
6/22/2010	9:46:22 AM	H2 MFC set to  0.000000
6/22/2010	9:46:22 AM	BCl3 MFC set to  0.000000
6/22/2010	9:46:22 AM	PHl3 MFC set to  0.000000
6/22/2010	9:46:22 AM	SiCl4 MFC set to  0.000000
6/22/2010	9:46:22 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	9:46:22 AM	Tube furnace set to 0
6/22/2010	9:46:22 AM	Run finished at 9:46 AM
6/22/2010	9:46:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/22/2010	9:46:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/22/2010	9:46:25 AM	Recipe started at 9:46 AM
6/22/2010	9:46:25 AM	Helium valve closed
6/22/2010	9:46:25 AM	H2 valve closed
6/22/2010	9:46:25 AM	BCl3 valve closed
6/22/2010	9:46:25 AM	PH3 valve closed
6/22/2010	9:46:25 AM	SiCl4 pre valve closed
6/22/2010	9:46:25 AM	SiCl4 post valve closed
6/22/2010	9:46:25 AM	Main Vac valve closed
6/22/2010	9:46:25 AM	Bubbler valve closed
6/22/2010	9:46:25 AM	Bypass valve opened
6/22/2010	9:46:25 AM	Helium MFC set to  0.000000
6/22/2010	9:46:25 AM	H2 MFC set to  0.000000
6/22/2010	9:46:25 AM	BCl3 MFC set to  0.000000
6/22/2010	9:46:26 AM	PHl3 MFC set to  0.000000
6/22/2010	9:46:26 AM	SiCl4 MFC set to  0.000000
6/22/2010	9:46:26 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	9:46:26 AM	Tube furnace set to 0
6/22/2010	9:47:14 AM	Helium valve closed
6/22/2010	9:47:14 AM	H2 valve closed
6/22/2010	9:47:14 AM	BCl3 valve closed
6/22/2010	9:47:14 AM	PH3 valve closed
6/22/2010	9:47:14 AM	SiCl4 pre valve closed
6/22/2010	9:47:14 AM	SiCl4 post valve closed
6/22/2010	9:47:14 AM	Bubbler valve closed
6/22/2010	9:47:14 AM	Main Vac valve opened
6/22/2010	9:47:14 AM	Bypass valve opened
6/22/2010	9:47:14 AM	Helium MFC set to  0.000000
6/22/2010	9:47:14 AM	H2 MFC set to  0.000000
6/22/2010	9:47:14 AM	BCl3 MFC set to  0.000000
6/22/2010	9:47:14 AM	PHl3 MFC set to  0.000000
6/22/2010	9:47:14 AM	SiCl4 MFC set to  0.000000
6/22/2010	9:47:14 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	9:47:14 AM	Tube furnace set to 0
6/22/2010	9:47:15 AM	Run finished at 9:47 AM
6/22/2010	9:47:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/22/2010	9:48:25 AM	Recipe started at 9:48 AM
6/22/2010	9:48:25 AM	H2 valve closed
6/22/2010	9:48:25 AM	BCl3 valve closed
6/22/2010	9:48:25 AM	PH3 valve closed
6/22/2010	9:48:25 AM	SiCl4 pre valve closed
6/22/2010	9:48:25 AM	SiCl4 post valve closed
6/22/2010	9:48:25 AM	Main Vac valve closed
6/22/2010	9:48:25 AM	Bypass valve closed
6/22/2010	9:48:25 AM	Bubbler valve closed
6/22/2010	9:48:25 AM	Helium valve opened
6/22/2010	9:48:25 AM	Helium MFC set to  500.000000
6/22/2010	9:48:25 AM	H2 MFC set to  0.000000
6/22/2010	9:48:25 AM	BCl3 MFC set to  0.000000
6/22/2010	9:48:25 AM	PHl3 MFC set to  0.000000
6/22/2010	9:48:25 AM	SiCl4 MFC set to  0.000000
6/22/2010	9:48:25 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	9:48:25 AM	Tube furnace set to 0
6/22/2010	9:49:46 AM	Helium valve closed
6/22/2010	9:49:46 AM	H2 valve closed
6/22/2010	9:49:46 AM	BCl3 valve closed
6/22/2010	9:49:46 AM	PH3 valve closed
6/22/2010	9:49:46 AM	SiCl4 pre valve closed
6/22/2010	9:49:46 AM	SiCl4 post valve closed
6/22/2010	9:49:46 AM	Main Vac valve closed
6/22/2010	9:49:46 AM	Bypass valve closed
6/22/2010	9:49:46 AM	Bubbler valve closed
6/22/2010	9:49:46 AM	Helium MFC set to  0.000000
6/22/2010	9:49:46 AM	H2 MFC set to  0.000000
6/22/2010	9:49:46 AM	BCl3 MFC set to  0.000000
6/22/2010	9:49:46 AM	PHl3 MFC set to  0.000000
6/22/2010	9:49:46 AM	SiCl4 MFC set to  0.000000
6/22/2010	9:49:46 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	9:49:46 AM	Tube furnace set to 0
6/22/2010	9:50:01 AM	Helium valve closed
6/22/2010	9:50:01 AM	H2 valve closed
6/22/2010	9:50:01 AM	BCl3 valve closed
6/22/2010	9:50:01 AM	PH3 valve closed
6/22/2010	9:50:01 AM	SiCl4 pre valve closed
6/22/2010	9:50:01 AM	SiCl4 post valve closed
6/22/2010	9:50:01 AM	Main Vac valve closed
6/22/2010	9:50:01 AM	Bubbler valve closed
6/22/2010	9:50:01 AM	Bypass valve opened
6/22/2010	9:50:01 AM	Helium MFC set to  0.000000
6/22/2010	9:50:01 AM	H2 MFC set to  0.000000
6/22/2010	9:50:01 AM	BCl3 MFC set to  0.000000
6/22/2010	9:50:01 AM	PHl3 MFC set to  0.000000
6/22/2010	9:50:01 AM	SiCl4 MFC set to  0.000000
6/22/2010	9:50:01 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	9:50:01 AM	Tube furnace set to 0
6/22/2010	9:50:35 AM	Helium valve closed
6/22/2010	9:50:35 AM	H2 valve closed
6/22/2010	9:50:35 AM	BCl3 valve closed
6/22/2010	9:50:35 AM	PH3 valve closed
6/22/2010	9:50:35 AM	SiCl4 pre valve closed
6/22/2010	9:50:35 AM	SiCl4 post valve closed
6/22/2010	9:50:35 AM	Bubbler valve closed
6/22/2010	9:50:35 AM	Main Vac valve opened
6/22/2010	9:50:35 AM	Bypass valve opened
6/22/2010	9:50:35 AM	Helium MFC set to  0.000000
6/22/2010	9:50:35 AM	H2 MFC set to  0.000000
6/22/2010	9:50:35 AM	BCl3 MFC set to  0.000000
6/22/2010	9:50:35 AM	PHl3 MFC set to  0.000000
6/22/2010	9:50:35 AM	SiCl4 MFC set to  0.000000
6/22/2010	9:50:35 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	9:50:35 AM	Tube furnace set to 0
6/22/2010	9:55:35 AM	H2 valve closed
6/22/2010	9:55:35 AM	BCl3 valve closed
6/22/2010	9:55:35 AM	PH3 valve closed
6/22/2010	9:55:35 AM	SiCl4 pre valve closed
6/22/2010	9:55:35 AM	SiCl4 post valve closed
6/22/2010	9:55:35 AM	Main Vac valve closed
6/22/2010	9:55:35 AM	Bypass valve closed
6/22/2010	9:55:35 AM	Bubbler valve closed
6/22/2010	9:55:35 AM	Helium valve opened
6/22/2010	9:55:35 AM	Helium MFC set to  500.000000
6/22/2010	9:55:35 AM	H2 MFC set to  0.000000
6/22/2010	9:55:35 AM	BCl3 MFC set to  0.000000
6/22/2010	9:55:35 AM	PHl3 MFC set to  0.000000
6/22/2010	9:55:35 AM	SiCl4 MFC set to  0.000000
6/22/2010	9:55:35 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	9:55:35 AM	Tube furnace set to 0
6/22/2010	9:56:55 AM	Helium valve closed
6/22/2010	9:56:55 AM	H2 valve closed
6/22/2010	9:56:55 AM	BCl3 valve closed
6/22/2010	9:56:55 AM	PH3 valve closed
6/22/2010	9:56:55 AM	SiCl4 pre valve closed
6/22/2010	9:56:55 AM	SiCl4 post valve closed
6/22/2010	9:56:55 AM	Main Vac valve closed
6/22/2010	9:56:55 AM	Bypass valve closed
6/22/2010	9:56:55 AM	Bubbler valve closed
6/22/2010	9:56:55 AM	Helium MFC set to  0.000000
6/22/2010	9:56:55 AM	H2 MFC set to  0.000000
6/22/2010	9:56:55 AM	BCl3 MFC set to  0.000000
6/22/2010	9:56:55 AM	PHl3 MFC set to  0.000000
6/22/2010	9:56:55 AM	SiCl4 MFC set to  0.000000
6/22/2010	9:56:55 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	9:56:55 AM	Tube furnace set to 0
6/22/2010	9:57:10 AM	Helium valve closed
6/22/2010	9:57:10 AM	H2 valve closed
6/22/2010	9:57:10 AM	BCl3 valve closed
6/22/2010	9:57:10 AM	PH3 valve closed
6/22/2010	9:57:10 AM	SiCl4 pre valve closed
6/22/2010	9:57:10 AM	SiCl4 post valve closed
6/22/2010	9:57:10 AM	Main Vac valve closed
6/22/2010	9:57:10 AM	Bubbler valve closed
6/22/2010	9:57:10 AM	Bypass valve opened
6/22/2010	9:57:10 AM	Helium MFC set to  0.000000
6/22/2010	9:57:10 AM	H2 MFC set to  0.000000
6/22/2010	9:57:10 AM	BCl3 MFC set to  0.000000
6/22/2010	9:57:10 AM	PHl3 MFC set to  0.000000
6/22/2010	9:57:10 AM	SiCl4 MFC set to  0.000000
6/22/2010	9:57:10 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	9:57:11 AM	Tube furnace set to 0
6/22/2010	9:57:44 AM	Helium valve closed
6/22/2010	9:57:44 AM	H2 valve closed
6/22/2010	9:57:44 AM	BCl3 valve closed
6/22/2010	9:57:44 AM	PH3 valve closed
6/22/2010	9:57:44 AM	SiCl4 pre valve closed
6/22/2010	9:57:44 AM	SiCl4 post valve closed
6/22/2010	9:57:44 AM	Bubbler valve closed
6/22/2010	9:57:44 AM	Main Vac valve opened
6/22/2010	9:57:44 AM	Bypass valve opened
6/22/2010	9:57:44 AM	Helium MFC set to  0.000000
6/22/2010	9:57:44 AM	H2 MFC set to  0.000000
6/22/2010	9:57:44 AM	BCl3 MFC set to  0.000000
6/22/2010	9:57:44 AM	PHl3 MFC set to  0.000000
6/22/2010	9:57:44 AM	SiCl4 MFC set to  0.000000
6/22/2010	9:57:44 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	9:57:44 AM	Tube furnace set to 0
6/22/2010	10:02:44 AM	H2 valve closed
6/22/2010	10:02:44 AM	BCl3 valve closed
6/22/2010	10:02:44 AM	PH3 valve closed
6/22/2010	10:02:44 AM	SiCl4 pre valve closed
6/22/2010	10:02:44 AM	SiCl4 post valve closed
6/22/2010	10:02:44 AM	Main Vac valve closed
6/22/2010	10:02:44 AM	Bypass valve closed
6/22/2010	10:02:44 AM	Bubbler valve closed
6/22/2010	10:02:44 AM	Helium valve opened
6/22/2010	10:02:44 AM	Helium MFC set to  500.000000
6/22/2010	10:02:44 AM	H2 MFC set to  0.000000
6/22/2010	10:02:44 AM	BCl3 MFC set to  0.000000
6/22/2010	10:02:44 AM	PHl3 MFC set to  0.000000
6/22/2010	10:02:44 AM	SiCl4 MFC set to  0.000000
6/22/2010	10:02:44 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	10:02:44 AM	Tube furnace set to 0
6/22/2010	10:04:04 AM	Helium valve closed
6/22/2010	10:04:04 AM	H2 valve closed
6/22/2010	10:04:04 AM	BCl3 valve closed
6/22/2010	10:04:04 AM	PH3 valve closed
6/22/2010	10:04:04 AM	SiCl4 pre valve closed
6/22/2010	10:04:04 AM	SiCl4 post valve closed
6/22/2010	10:04:04 AM	Main Vac valve closed
6/22/2010	10:04:04 AM	Bypass valve closed
6/22/2010	10:04:04 AM	Bubbler valve closed
6/22/2010	10:04:04 AM	Helium MFC set to  0.000000
6/22/2010	10:04:04 AM	H2 MFC set to  0.000000
6/22/2010	10:04:04 AM	BCl3 MFC set to  0.000000
6/22/2010	10:04:04 AM	PHl3 MFC set to  0.000000
6/22/2010	10:04:04 AM	SiCl4 MFC set to  0.000000
6/22/2010	10:04:04 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	10:04:04 AM	Tube furnace set to 0
6/22/2010	10:04:19 AM	Helium valve closed
6/22/2010	10:04:19 AM	H2 valve closed
6/22/2010	10:04:19 AM	BCl3 valve closed
6/22/2010	10:04:19 AM	PH3 valve closed
6/22/2010	10:04:19 AM	SiCl4 pre valve closed
6/22/2010	10:04:19 AM	SiCl4 post valve closed
6/22/2010	10:04:19 AM	Main Vac valve closed
6/22/2010	10:04:19 AM	Bubbler valve closed
6/22/2010	10:04:19 AM	Bypass valve opened
6/22/2010	10:04:19 AM	Helium MFC set to  0.000000
6/22/2010	10:04:19 AM	H2 MFC set to  0.000000
6/22/2010	10:04:19 AM	BCl3 MFC set to  0.000000
6/22/2010	10:04:19 AM	PHl3 MFC set to  0.000000
6/22/2010	10:04:19 AM	SiCl4 MFC set to  0.000000
6/22/2010	10:04:19 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	10:04:19 AM	Tube furnace set to 0
6/22/2010	10:04:52 AM	Helium valve closed
6/22/2010	10:04:52 AM	H2 valve closed
6/22/2010	10:04:52 AM	BCl3 valve closed
6/22/2010	10:04:52 AM	PH3 valve closed
6/22/2010	10:04:52 AM	SiCl4 pre valve closed
6/22/2010	10:04:52 AM	SiCl4 post valve closed
6/22/2010	10:04:52 AM	Bubbler valve closed
6/22/2010	10:04:52 AM	Main Vac valve opened
6/22/2010	10:04:52 AM	Bypass valve opened
6/22/2010	10:04:52 AM	Helium MFC set to  0.000000
6/22/2010	10:04:52 AM	H2 MFC set to  0.000000
6/22/2010	10:04:52 AM	BCl3 MFC set to  0.000000
6/22/2010	10:04:52 AM	PHl3 MFC set to  0.000000
6/22/2010	10:04:52 AM	SiCl4 MFC set to  0.000000
6/22/2010	10:04:52 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	10:04:52 AM	Tube furnace set to 0
6/22/2010	10:09:52 AM	H2 valve closed
6/22/2010	10:09:52 AM	BCl3 valve closed
6/22/2010	10:09:52 AM	PH3 valve closed
6/22/2010	10:09:52 AM	SiCl4 pre valve closed
6/22/2010	10:09:52 AM	SiCl4 post valve closed
6/22/2010	10:09:52 AM	Bubbler valve closed
6/22/2010	10:09:53 AM	Helium valve opened
6/22/2010	10:09:53 AM	Main Vac valve opened
6/22/2010	10:09:53 AM	Bypass valve opened
6/22/2010	10:09:53 AM	Helium MFC set to  500.000000
6/22/2010	10:09:53 AM	H2 MFC set to  0.000000
6/22/2010	10:09:53 AM	BCl3 MFC set to  0.000000
6/22/2010	10:09:53 AM	PHl3 MFC set to  0.000000
6/22/2010	10:09:53 AM	SiCl4 MFC set to  0.000000
6/22/2010	10:09:53 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	10:09:53 AM	Tube furnace set to 0
6/22/2010	10:14:53 AM	Helium valve closed
6/22/2010	10:14:53 AM	H2 valve closed
6/22/2010	10:14:53 AM	BCl3 valve closed
6/22/2010	10:14:53 AM	PH3 valve closed
6/22/2010	10:14:53 AM	SiCl4 pre valve closed
6/22/2010	10:14:53 AM	SiCl4 post valve closed
6/22/2010	10:14:53 AM	Bubbler valve closed
6/22/2010	10:14:53 AM	Main Vac valve opened
6/22/2010	10:14:53 AM	Bypass valve opened
6/22/2010	10:14:53 AM	Helium MFC set to  0.000000
6/22/2010	10:14:53 AM	H2 MFC set to  0.000000
6/22/2010	10:14:53 AM	BCl3 MFC set to  0.000000
6/22/2010	10:14:53 AM	PHl3 MFC set to  0.000000
6/22/2010	10:14:53 AM	SiCl4 MFC set to  0.000000
6/22/2010	10:14:53 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	10:14:53 AM	Tube furnace set to 0
6/22/2010	10:19:53 AM	H2 valve closed
6/22/2010	10:19:53 AM	BCl3 valve closed
6/22/2010	10:19:53 AM	PH3 valve closed
6/22/2010	10:19:53 AM	SiCl4 pre valve closed
6/22/2010	10:19:53 AM	SiCl4 post valve closed
6/22/2010	10:19:53 AM	Bubbler valve closed
6/22/2010	10:19:53 AM	Helium valve opened
6/22/2010	10:19:53 AM	Main Vac valve opened
6/22/2010	10:19:53 AM	Bypass valve opened
6/22/2010	10:19:53 AM	Helium MFC set to  500.000000
6/22/2010	10:19:53 AM	H2 MFC set to  0.000000
6/22/2010	10:19:53 AM	BCl3 MFC set to  0.000000
6/22/2010	10:19:53 AM	PHl3 MFC set to  0.000000
6/22/2010	10:19:53 AM	SiCl4 MFC set to  0.000000
6/22/2010	10:19:53 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	10:19:53 AM	Tube furnace set to 0
6/22/2010	10:24:53 AM	Helium valve closed
6/22/2010	10:24:53 AM	H2 valve closed
6/22/2010	10:24:53 AM	BCl3 valve closed
6/22/2010	10:24:53 AM	PH3 valve closed
6/22/2010	10:24:53 AM	SiCl4 pre valve closed
6/22/2010	10:24:53 AM	SiCl4 post valve closed
6/22/2010	10:24:53 AM	Bubbler valve closed
6/22/2010	10:24:53 AM	Main Vac valve opened
6/22/2010	10:24:53 AM	Bypass valve opened
6/22/2010	10:24:53 AM	Helium MFC set to  0.000000
6/22/2010	10:24:53 AM	H2 MFC set to  0.000000
6/22/2010	10:24:53 AM	BCl3 MFC set to  0.000000
6/22/2010	10:24:53 AM	PHl3 MFC set to  0.000000
6/22/2010	10:24:53 AM	SiCl4 MFC set to  0.000000
6/22/2010	10:24:53 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	10:24:53 AM	Tube furnace set to 0
6/22/2010	10:29:53 AM	H2 valve closed
6/22/2010	10:29:53 AM	BCl3 valve closed
6/22/2010	10:29:53 AM	PH3 valve closed
6/22/2010	10:29:53 AM	SiCl4 pre valve closed
6/22/2010	10:29:53 AM	SiCl4 post valve closed
6/22/2010	10:29:53 AM	Bubbler valve closed
6/22/2010	10:29:53 AM	Helium valve opened
6/22/2010	10:29:53 AM	Main Vac valve opened
6/22/2010	10:29:53 AM	Bypass valve opened
6/22/2010	10:29:53 AM	Helium MFC set to  500.000000
6/22/2010	10:29:53 AM	H2 MFC set to  0.000000
6/22/2010	10:29:53 AM	BCl3 MFC set to  0.000000
6/22/2010	10:29:53 AM	PHl3 MFC set to  0.000000
6/22/2010	10:29:53 AM	SiCl4 MFC set to  0.000000
6/22/2010	10:29:53 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	10:29:53 AM	Tube furnace set to 0
6/22/2010	10:34:53 AM	Helium valve closed
6/22/2010	10:34:53 AM	H2 valve closed
6/22/2010	10:34:53 AM	BCl3 valve closed
6/22/2010	10:34:53 AM	PH3 valve closed
6/22/2010	10:34:53 AM	SiCl4 pre valve closed
6/22/2010	10:34:53 AM	SiCl4 post valve closed
6/22/2010	10:34:53 AM	Bubbler valve closed
6/22/2010	10:34:53 AM	Main Vac valve opened
6/22/2010	10:34:53 AM	Bypass valve opened
6/22/2010	10:34:53 AM	Helium MFC set to  0.000000
6/22/2010	10:34:53 AM	H2 MFC set to  0.000000
6/22/2010	10:34:53 AM	BCl3 MFC set to  0.000000
6/22/2010	10:34:53 AM	PHl3 MFC set to  0.000000
6/22/2010	10:34:53 AM	SiCl4 MFC set to  0.000000
6/22/2010	10:34:53 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	10:34:54 AM	Tube furnace set to 0
6/22/2010	10:39:54 AM	H2 valve closed
6/22/2010	10:39:54 AM	BCl3 valve closed
6/22/2010	10:39:54 AM	PH3 valve closed
6/22/2010	10:39:54 AM	SiCl4 pre valve closed
6/22/2010	10:39:54 AM	SiCl4 post valve closed
6/22/2010	10:39:54 AM	Bubbler valve closed
6/22/2010	10:39:54 AM	Helium valve opened
6/22/2010	10:39:54 AM	Main Vac valve opened
6/22/2010	10:39:54 AM	Bypass valve opened
6/22/2010	10:39:54 AM	Helium MFC set to  500.000000
6/22/2010	10:39:54 AM	H2 MFC set to  0.000000
6/22/2010	10:39:54 AM	BCl3 MFC set to  0.000000
6/22/2010	10:39:54 AM	PHl3 MFC set to  0.000000
6/22/2010	10:39:54 AM	SiCl4 MFC set to  0.000000
6/22/2010	10:39:54 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	10:39:54 AM	Tube furnace set to 0
6/22/2010	10:44:54 AM	Helium valve closed
6/22/2010	10:44:54 AM	H2 valve closed
6/22/2010	10:44:54 AM	BCl3 valve closed
6/22/2010	10:44:54 AM	PH3 valve closed
6/22/2010	10:44:54 AM	SiCl4 pre valve closed
6/22/2010	10:44:54 AM	SiCl4 post valve closed
6/22/2010	10:44:54 AM	Bubbler valve closed
6/22/2010	10:44:54 AM	Main Vac valve opened
6/22/2010	10:44:54 AM	Bypass valve opened
6/22/2010	10:44:54 AM	Helium MFC set to  0.000000
6/22/2010	10:44:54 AM	H2 MFC set to  0.000000
6/22/2010	10:44:54 AM	BCl3 MFC set to  0.000000
6/22/2010	10:44:54 AM	PHl3 MFC set to  0.000000
6/22/2010	10:44:54 AM	SiCl4 MFC set to  0.000000
6/22/2010	10:44:54 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	10:44:54 AM	Tube furnace set to 0
6/22/2010	10:49:54 AM	H2 valve closed
6/22/2010	10:49:54 AM	BCl3 valve closed
6/22/2010	10:49:54 AM	PH3 valve closed
6/22/2010	10:49:54 AM	SiCl4 pre valve closed
6/22/2010	10:49:54 AM	SiCl4 post valve closed
6/22/2010	10:49:54 AM	Bubbler valve closed
6/22/2010	10:49:54 AM	Helium valve opened
6/22/2010	10:49:54 AM	Main Vac valve opened
6/22/2010	10:49:54 AM	Bypass valve opened
6/22/2010	10:49:54 AM	Helium MFC set to  500.000000
6/22/2010	10:49:54 AM	H2 MFC set to  0.000000
6/22/2010	10:49:54 AM	BCl3 MFC set to  0.000000
6/22/2010	10:49:54 AM	PHl3 MFC set to  0.000000
6/22/2010	10:49:54 AM	SiCl4 MFC set to  0.000000
6/22/2010	10:49:54 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	10:49:54 AM	Tube furnace set to 0
6/22/2010	10:54:54 AM	Helium valve closed
6/22/2010	10:54:54 AM	H2 valve closed
6/22/2010	10:54:54 AM	BCl3 valve closed
6/22/2010	10:54:54 AM	PH3 valve closed
6/22/2010	10:54:54 AM	SiCl4 pre valve closed
6/22/2010	10:54:54 AM	SiCl4 post valve closed
6/22/2010	10:54:54 AM	Bubbler valve closed
6/22/2010	10:54:54 AM	Main Vac valve opened
6/22/2010	10:54:54 AM	Bypass valve opened
6/22/2010	10:54:54 AM	Helium MFC set to  0.000000
6/22/2010	10:54:54 AM	H2 MFC set to  0.000000
6/22/2010	10:54:54 AM	BCl3 MFC set to  0.000000
6/22/2010	10:54:54 AM	PHl3 MFC set to  0.000000
6/22/2010	10:54:54 AM	SiCl4 MFC set to  0.000000
6/22/2010	10:54:54 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	10:54:54 AM	Tube furnace set to 0
6/22/2010	10:59:54 AM	Run finished at 10:59 AM
6/22/2010	11:05:17 AM	Helium MFC set to  500.000000
6/22/2010	11:05:18 AM	Helium valve opened
6/22/2010	11:10:10 AM	Helium valve closed
6/22/2010	11:10:49 AM	Bypass valve closed
6/22/2010	11:10:49 AM	Main Vac valve closed
6/22/2010	11:11:03 AM	Bypass valve opened
6/22/2010	11:11:04 AM	Main Vac valve opened
6/22/2010	11:11:28 AM	Recipe started at 11:11 AM
6/22/2010	11:11:28 AM	Helium valve closed
6/22/2010	11:11:28 AM	BCl3 valve closed
6/22/2010	11:11:28 AM	PH3 valve closed
6/22/2010	11:11:28 AM	SiCl4 pre valve closed
6/22/2010	11:11:28 AM	SiCl4 post valve closed
6/22/2010	11:11:28 AM	Main Vac valve closed
6/22/2010	11:11:28 AM	Bypass valve closed
6/22/2010	11:11:28 AM	Bubbler valve closed
6/22/2010	11:11:28 AM	H2 valve opened
6/22/2010	11:11:28 AM	Helium MFC set to  0.000000
6/22/2010	11:11:28 AM	H2 MFC set to  500.000000
6/22/2010	11:11:28 AM	BCl3 MFC set to  0.000000
6/22/2010	11:11:28 AM	PHl3 MFC set to  0.000000
6/22/2010	11:11:28 AM	SiCl4 MFC set to  0.000000
6/22/2010	11:11:28 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	11:11:28 AM	Tube furnace set to 0
6/22/2010	11:12:49 AM	Helium valve closed
6/22/2010	11:12:49 AM	BCl3 valve closed
6/22/2010	11:12:49 AM	PH3 valve closed
6/22/2010	11:12:49 AM	SiCl4 pre valve closed
6/22/2010	11:12:49 AM	SiCl4 post valve closed
6/22/2010	11:12:49 AM	Main Vac valve closed
6/22/2010	11:12:49 AM	Bypass valve closed
6/22/2010	11:12:49 AM	H2 valve opened
6/22/2010	11:12:49 AM	Bubbler valve opened
6/22/2010	11:12:49 AM	Helium MFC set to  0.000000
6/22/2010	11:12:49 AM	H2 MFC set to  500.000000
6/22/2010	11:12:49 AM	BCl3 MFC set to  0.000000
6/22/2010	11:12:49 AM	PHl3 MFC set to  0.000000
6/22/2010	11:12:49 AM	SiCl4 MFC set to  0.000000
6/22/2010	11:12:49 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	11:12:49 AM	Tube furnace set to 1000
6/22/2010	11:32:49 AM	Helium valve closed
6/22/2010	11:32:49 AM	PH3 valve closed
6/22/2010	11:32:49 AM	Main Vac valve closed
6/22/2010	11:32:49 AM	Bypass valve closed
6/22/2010	11:32:49 AM	H2 valve opened
6/22/2010	11:32:49 AM	BCl3 valve opened
6/22/2010	11:32:49 AM	SiCl4 pre valve opened
6/22/2010	11:32:49 AM	SiCl4 post valve opened
6/22/2010	11:32:49 AM	Bubbler valve opened
6/22/2010	11:32:49 AM	Helium MFC set to  0.000000
6/22/2010	11:32:49 AM	H2 MFC set to  500.000000
6/22/2010	11:32:49 AM	BCl3 MFC set to  35.000000
6/22/2010	11:32:49 AM	PHl3 MFC set to  0.000000
6/22/2010	11:32:49 AM	SiCl4 MFC set to  50.000000
6/22/2010	11:32:49 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	11:32:49 AM	Tube furnace set to 1000
6/22/2010	11:47:49 AM	H2 valve closed
6/22/2010	11:47:49 AM	BCl3 valve closed
6/22/2010	11:47:49 AM	PH3 valve closed
6/22/2010	11:47:49 AM	SiCl4 pre valve closed
6/22/2010	11:47:49 AM	SiCl4 post valve closed
6/22/2010	11:47:49 AM	Main Vac valve closed
6/22/2010	11:47:49 AM	Bypass valve closed
6/22/2010	11:47:49 AM	Helium valve opened
6/22/2010	11:47:49 AM	Bubbler valve opened
6/22/2010	11:47:49 AM	Helium MFC set to  500.000000
6/22/2010	11:47:49 AM	H2 MFC set to  0.000000
6/22/2010	11:47:49 AM	BCl3 MFC set to  0.000000
6/22/2010	11:47:49 AM	PHl3 MFC set to  0.000000
6/22/2010	11:47:49 AM	SiCl4 MFC set to  0.000000
6/22/2010	11:47:49 AM	Bypass solenoid MFC set to  0.000000
6/22/2010	11:47:49 AM	Tube furnace set to 750
6/22/2010	12:07:49 PM	H2 valve closed
6/22/2010	12:07:49 PM	BCl3 valve closed
6/22/2010	12:07:49 PM	PH3 valve closed
6/22/2010	12:07:49 PM	SiCl4 pre valve closed
6/22/2010	12:07:49 PM	SiCl4 post valve closed
6/22/2010	12:07:49 PM	Main Vac valve closed
6/22/2010	12:07:49 PM	Bypass valve closed
6/22/2010	12:07:49 PM	Helium valve opened
6/22/2010	12:07:49 PM	Bubbler valve opened
6/22/2010	12:07:49 PM	Helium MFC set to  500.000000
6/22/2010	12:07:49 PM	H2 MFC set to  0.000000
6/22/2010	12:07:50 PM	BCl3 MFC set to  0.000000
6/22/2010	12:07:50 PM	PHl3 MFC set to  0.000000
6/22/2010	12:07:50 PM	SiCl4 MFC set to  0.000000
6/22/2010	12:07:50 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	12:07:50 PM	Tube furnace set to 0
6/22/2010	12:27:50 PM	Helium valve closed
6/22/2010	12:27:50 PM	H2 valve closed
6/22/2010	12:27:50 PM	BCl3 valve closed
6/22/2010	12:27:50 PM	PH3 valve closed
6/22/2010	12:27:50 PM	SiCl4 pre valve closed
6/22/2010	12:27:50 PM	SiCl4 post valve closed
6/22/2010	12:27:50 PM	Main Vac valve closed
6/22/2010	12:27:50 PM	Bypass valve closed
6/22/2010	12:27:50 PM	Bubbler valve closed
6/22/2010	12:27:50 PM	Helium MFC set to  0.000000
6/22/2010	12:27:50 PM	H2 MFC set to  0.000000
6/22/2010	12:27:50 PM	BCl3 MFC set to  0.000000
6/22/2010	12:27:50 PM	PHl3 MFC set to  0.000000
6/22/2010	12:27:50 PM	SiCl4 MFC set to  0.000000
6/22/2010	12:27:50 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	12:27:50 PM	Tube furnace set to 0
6/22/2010	12:27:50 PM	Run finished at 12:27 PM
6/22/2010	1:18:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/22/2010	1:18:41 PM	Recipe started at 1:18 PM
6/22/2010	1:18:41 PM	H2 valve closed
6/22/2010	1:18:41 PM	BCl3 valve closed
6/22/2010	1:18:41 PM	PH3 valve closed
6/22/2010	1:18:41 PM	SiCl4 pre valve closed
6/22/2010	1:18:41 PM	SiCl4 post valve closed
6/22/2010	1:18:41 PM	Main Vac valve closed
6/22/2010	1:18:41 PM	Bypass valve closed
6/22/2010	1:18:41 PM	Bubbler valve closed
6/22/2010	1:18:41 PM	Helium valve opened
6/22/2010	1:18:41 PM	Helium MFC set to  500.000000
6/22/2010	1:18:41 PM	H2 MFC set to  0.000000
6/22/2010	1:18:41 PM	BCl3 MFC set to  0.000000
6/22/2010	1:18:41 PM	PHl3 MFC set to  0.000000
6/22/2010	1:18:41 PM	SiCl4 MFC set to  0.000000
6/22/2010	1:18:41 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	1:18:41 PM	Tube furnace set to 0
6/22/2010	1:18:48 PM	Helium valve closed
6/22/2010	1:18:48 PM	H2 valve closed
6/22/2010	1:18:48 PM	BCl3 valve closed
6/22/2010	1:18:48 PM	PH3 valve closed
6/22/2010	1:18:48 PM	SiCl4 pre valve closed
6/22/2010	1:18:48 PM	SiCl4 post valve closed
6/22/2010	1:18:48 PM	Main Vac valve closed
6/22/2010	1:18:48 PM	Bypass valve closed
6/22/2010	1:18:48 PM	Bubbler valve closed
6/22/2010	1:18:48 PM	Helium MFC set to  0.000000
6/22/2010	1:18:48 PM	H2 MFC set to  0.000000
6/22/2010	1:18:48 PM	BCl3 MFC set to  0.000000
6/22/2010	1:18:48 PM	PHl3 MFC set to  0.000000
6/22/2010	1:18:48 PM	SiCl4 MFC set to  0.000000
6/22/2010	1:18:48 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	1:18:48 PM	Tube furnace set to 0
6/22/2010	1:18:49 PM	Run finished at 1:18 PM
6/22/2010	1:18:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/22/2010	1:31:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/22/2010	1:31:36 PM	Recipe started at 1:31 PM
6/22/2010	1:31:36 PM	Helium valve closed
6/22/2010	1:31:36 PM	H2 valve closed
6/22/2010	1:31:36 PM	BCl3 valve closed
6/22/2010	1:31:36 PM	PH3 valve closed
6/22/2010	1:31:36 PM	SiCl4 pre valve closed
6/22/2010	1:31:36 PM	SiCl4 post valve closed
6/22/2010	1:31:36 PM	Main Vac valve closed
6/22/2010	1:31:36 PM	Bubbler valve closed
6/22/2010	1:31:36 PM	Bypass valve opened
6/22/2010	1:31:36 PM	Helium MFC set to  0.000000
6/22/2010	1:31:36 PM	H2 MFC set to  0.000000
6/22/2010	1:31:36 PM	BCl3 MFC set to  0.000000
6/22/2010	1:31:36 PM	PHl3 MFC set to  0.000000
6/22/2010	1:31:36 PM	SiCl4 MFC set to  0.000000
6/22/2010	1:31:36 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	1:31:36 PM	Tube furnace set to 0
6/22/2010	1:32:25 PM	Helium valve closed
6/22/2010	1:32:25 PM	H2 valve closed
6/22/2010	1:32:25 PM	BCl3 valve closed
6/22/2010	1:32:25 PM	PH3 valve closed
6/22/2010	1:32:25 PM	SiCl4 pre valve closed
6/22/2010	1:32:25 PM	SiCl4 post valve closed
6/22/2010	1:32:25 PM	Bubbler valve closed
6/22/2010	1:32:25 PM	Main Vac valve opened
6/22/2010	1:32:25 PM	Bypass valve opened
6/22/2010	1:32:25 PM	Helium MFC set to  0.000000
6/22/2010	1:32:25 PM	H2 MFC set to  0.000000
6/22/2010	1:32:25 PM	BCl3 MFC set to  0.000000
6/22/2010	1:32:25 PM	PHl3 MFC set to  0.000000
6/22/2010	1:32:25 PM	SiCl4 MFC set to  0.000000
6/22/2010	1:32:25 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	1:32:25 PM	Tube furnace set to 0
6/22/2010	1:32:25 PM	Run finished at 1:32 PM
6/22/2010	1:32:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/22/2010	1:34:10 PM	Recipe started at 1:34 PM
6/22/2010	1:34:10 PM	H2 valve closed
6/22/2010	1:34:10 PM	BCl3 valve closed
6/22/2010	1:34:10 PM	PH3 valve closed
6/22/2010	1:34:10 PM	SiCl4 pre valve closed
6/22/2010	1:34:10 PM	SiCl4 post valve closed
6/22/2010	1:34:10 PM	Main Vac valve closed
6/22/2010	1:34:10 PM	Bypass valve closed
6/22/2010	1:34:10 PM	Bubbler valve closed
6/22/2010	1:34:10 PM	Helium valve opened
6/22/2010	1:34:10 PM	Helium MFC set to  500.000000
6/22/2010	1:34:10 PM	H2 MFC set to  0.000000
6/22/2010	1:34:10 PM	BCl3 MFC set to  0.000000
6/22/2010	1:34:10 PM	PHl3 MFC set to  0.000000
6/22/2010	1:34:10 PM	SiCl4 MFC set to  0.000000
6/22/2010	1:34:10 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	1:34:10 PM	Tube furnace set to 0
6/22/2010	1:35:31 PM	Helium valve closed
6/22/2010	1:35:31 PM	H2 valve closed
6/22/2010	1:35:31 PM	BCl3 valve closed
6/22/2010	1:35:31 PM	PH3 valve closed
6/22/2010	1:35:31 PM	SiCl4 pre valve closed
6/22/2010	1:35:31 PM	SiCl4 post valve closed
6/22/2010	1:35:31 PM	Main Vac valve closed
6/22/2010	1:35:31 PM	Bypass valve closed
6/22/2010	1:35:31 PM	Bubbler valve closed
6/22/2010	1:35:31 PM	Helium MFC set to  0.000000
6/22/2010	1:35:31 PM	H2 MFC set to  0.000000
6/22/2010	1:35:31 PM	BCl3 MFC set to  0.000000
6/22/2010	1:35:31 PM	PHl3 MFC set to  0.000000
6/22/2010	1:35:31 PM	SiCl4 MFC set to  0.000000
6/22/2010	1:35:31 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	1:35:31 PM	Tube furnace set to 0
6/22/2010	1:35:46 PM	Helium valve closed
6/22/2010	1:35:46 PM	H2 valve closed
6/22/2010	1:35:46 PM	BCl3 valve closed
6/22/2010	1:35:46 PM	PH3 valve closed
6/22/2010	1:35:46 PM	SiCl4 pre valve closed
6/22/2010	1:35:46 PM	SiCl4 post valve closed
6/22/2010	1:35:46 PM	Main Vac valve closed
6/22/2010	1:35:46 PM	Bubbler valve closed
6/22/2010	1:35:46 PM	Bypass valve opened
6/22/2010	1:35:46 PM	Helium MFC set to  0.000000
6/22/2010	1:35:46 PM	H2 MFC set to  0.000000
6/22/2010	1:35:46 PM	BCl3 MFC set to  0.000000
6/22/2010	1:35:46 PM	PHl3 MFC set to  0.000000
6/22/2010	1:35:46 PM	SiCl4 MFC set to  0.000000
6/22/2010	1:35:46 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	1:35:46 PM	Tube furnace set to 0
6/22/2010	1:36:20 PM	Helium valve closed
6/22/2010	1:36:20 PM	H2 valve closed
6/22/2010	1:36:20 PM	BCl3 valve closed
6/22/2010	1:36:20 PM	PH3 valve closed
6/22/2010	1:36:20 PM	SiCl4 pre valve closed
6/22/2010	1:36:20 PM	SiCl4 post valve closed
6/22/2010	1:36:20 PM	Bubbler valve closed
6/22/2010	1:36:20 PM	Main Vac valve opened
6/22/2010	1:36:20 PM	Bypass valve opened
6/22/2010	1:36:20 PM	Helium MFC set to  0.000000
6/22/2010	1:36:20 PM	H2 MFC set to  0.000000
6/22/2010	1:36:20 PM	BCl3 MFC set to  0.000000
6/22/2010	1:36:20 PM	PHl3 MFC set to  0.000000
6/22/2010	1:36:20 PM	SiCl4 MFC set to  0.000000
6/22/2010	1:36:20 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	1:36:20 PM	Tube furnace set to 0
6/22/2010	1:41:20 PM	H2 valve closed
6/22/2010	1:41:20 PM	BCl3 valve closed
6/22/2010	1:41:20 PM	PH3 valve closed
6/22/2010	1:41:20 PM	SiCl4 pre valve closed
6/22/2010	1:41:20 PM	SiCl4 post valve closed
6/22/2010	1:41:20 PM	Main Vac valve closed
6/22/2010	1:41:20 PM	Bypass valve closed
6/22/2010	1:41:20 PM	Bubbler valve closed
6/22/2010	1:41:20 PM	Helium valve opened
6/22/2010	1:41:20 PM	Helium MFC set to  500.000000
6/22/2010	1:41:20 PM	H2 MFC set to  0.000000
6/22/2010	1:41:20 PM	BCl3 MFC set to  0.000000
6/22/2010	1:41:20 PM	PHl3 MFC set to  0.000000
6/22/2010	1:41:20 PM	SiCl4 MFC set to  0.000000
6/22/2010	1:41:20 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	1:41:20 PM	Tube furnace set to 0
6/22/2010	1:42:41 PM	Helium valve closed
6/22/2010	1:42:41 PM	H2 valve closed
6/22/2010	1:42:41 PM	BCl3 valve closed
6/22/2010	1:42:41 PM	PH3 valve closed
6/22/2010	1:42:41 PM	SiCl4 pre valve closed
6/22/2010	1:42:41 PM	SiCl4 post valve closed
6/22/2010	1:42:41 PM	Main Vac valve closed
6/22/2010	1:42:41 PM	Bypass valve closed
6/22/2010	1:42:41 PM	Bubbler valve closed
6/22/2010	1:42:41 PM	Helium MFC set to  0.000000
6/22/2010	1:42:41 PM	H2 MFC set to  0.000000
6/22/2010	1:42:41 PM	BCl3 MFC set to  0.000000
6/22/2010	1:42:41 PM	PHl3 MFC set to  0.000000
6/22/2010	1:42:41 PM	SiCl4 MFC set to  0.000000
6/22/2010	1:42:41 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	1:42:41 PM	Tube furnace set to 0
6/22/2010	1:42:56 PM	Helium valve closed
6/22/2010	1:42:56 PM	H2 valve closed
6/22/2010	1:42:56 PM	BCl3 valve closed
6/22/2010	1:42:56 PM	PH3 valve closed
6/22/2010	1:42:56 PM	SiCl4 pre valve closed
6/22/2010	1:42:56 PM	SiCl4 post valve closed
6/22/2010	1:42:56 PM	Main Vac valve closed
6/22/2010	1:42:56 PM	Bubbler valve closed
6/22/2010	1:42:56 PM	Bypass valve opened
6/22/2010	1:42:56 PM	Helium MFC set to  0.000000
6/22/2010	1:42:56 PM	H2 MFC set to  0.000000
6/22/2010	1:42:56 PM	BCl3 MFC set to  0.000000
6/22/2010	1:42:56 PM	PHl3 MFC set to  0.000000
6/22/2010	1:42:56 PM	SiCl4 MFC set to  0.000000
6/22/2010	1:42:56 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	1:42:56 PM	Tube furnace set to 0
6/22/2010	1:43:29 PM	Helium valve closed
6/22/2010	1:43:29 PM	H2 valve closed
6/22/2010	1:43:29 PM	BCl3 valve closed
6/22/2010	1:43:29 PM	PH3 valve closed
6/22/2010	1:43:29 PM	SiCl4 pre valve closed
6/22/2010	1:43:29 PM	SiCl4 post valve closed
6/22/2010	1:43:29 PM	Bubbler valve closed
6/22/2010	1:43:29 PM	Main Vac valve opened
6/22/2010	1:43:29 PM	Bypass valve opened
6/22/2010	1:43:29 PM	Helium MFC set to  0.000000
6/22/2010	1:43:29 PM	H2 MFC set to  0.000000
6/22/2010	1:43:29 PM	BCl3 MFC set to  0.000000
6/22/2010	1:43:29 PM	PHl3 MFC set to  0.000000
6/22/2010	1:43:29 PM	SiCl4 MFC set to  0.000000
6/22/2010	1:43:29 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	1:43:30 PM	Tube furnace set to 0
6/22/2010	1:48:30 PM	H2 valve closed
6/22/2010	1:48:30 PM	BCl3 valve closed
6/22/2010	1:48:30 PM	PH3 valve closed
6/22/2010	1:48:30 PM	SiCl4 pre valve closed
6/22/2010	1:48:30 PM	SiCl4 post valve closed
6/22/2010	1:48:30 PM	Main Vac valve closed
6/22/2010	1:48:30 PM	Bypass valve closed
6/22/2010	1:48:30 PM	Bubbler valve closed
6/22/2010	1:48:30 PM	Helium valve opened
6/22/2010	1:48:30 PM	Helium MFC set to  500.000000
6/22/2010	1:48:30 PM	H2 MFC set to  0.000000
6/22/2010	1:48:30 PM	BCl3 MFC set to  0.000000
6/22/2010	1:48:30 PM	PHl3 MFC set to  0.000000
6/22/2010	1:48:30 PM	SiCl4 MFC set to  0.000000
6/22/2010	1:48:30 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	1:48:30 PM	Tube furnace set to 0
6/22/2010	1:49:50 PM	Helium valve closed
6/22/2010	1:49:50 PM	H2 valve closed
6/22/2010	1:49:50 PM	BCl3 valve closed
6/22/2010	1:49:50 PM	PH3 valve closed
6/22/2010	1:49:50 PM	SiCl4 pre valve closed
6/22/2010	1:49:50 PM	SiCl4 post valve closed
6/22/2010	1:49:50 PM	Main Vac valve closed
6/22/2010	1:49:50 PM	Bypass valve closed
6/22/2010	1:49:50 PM	Bubbler valve closed
6/22/2010	1:49:50 PM	Helium MFC set to  0.000000
6/22/2010	1:49:50 PM	H2 MFC set to  0.000000
6/22/2010	1:49:50 PM	BCl3 MFC set to  0.000000
6/22/2010	1:49:50 PM	PHl3 MFC set to  0.000000
6/22/2010	1:49:50 PM	SiCl4 MFC set to  0.000000
6/22/2010	1:49:50 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	1:49:50 PM	Tube furnace set to 0
6/22/2010	1:50:05 PM	Helium valve closed
6/22/2010	1:50:05 PM	H2 valve closed
6/22/2010	1:50:05 PM	BCl3 valve closed
6/22/2010	1:50:05 PM	PH3 valve closed
6/22/2010	1:50:05 PM	SiCl4 pre valve closed
6/22/2010	1:50:05 PM	SiCl4 post valve closed
6/22/2010	1:50:05 PM	Main Vac valve closed
6/22/2010	1:50:05 PM	Bubbler valve closed
6/22/2010	1:50:05 PM	Bypass valve opened
6/22/2010	1:50:05 PM	Helium MFC set to  0.000000
6/22/2010	1:50:05 PM	H2 MFC set to  0.000000
6/22/2010	1:50:05 PM	BCl3 MFC set to  0.000000
6/22/2010	1:50:05 PM	PHl3 MFC set to  0.000000
6/22/2010	1:50:05 PM	SiCl4 MFC set to  0.000000
6/22/2010	1:50:05 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	1:50:06 PM	Tube furnace set to 0
6/22/2010	1:50:39 PM	Helium valve closed
6/22/2010	1:50:39 PM	H2 valve closed
6/22/2010	1:50:39 PM	BCl3 valve closed
6/22/2010	1:50:39 PM	PH3 valve closed
6/22/2010	1:50:39 PM	SiCl4 pre valve closed
6/22/2010	1:50:39 PM	SiCl4 post valve closed
6/22/2010	1:50:39 PM	Bubbler valve closed
6/22/2010	1:50:39 PM	Main Vac valve opened
6/22/2010	1:50:39 PM	Bypass valve opened
6/22/2010	1:50:39 PM	Helium MFC set to  0.000000
6/22/2010	1:50:39 PM	H2 MFC set to  0.000000
6/22/2010	1:50:39 PM	BCl3 MFC set to  0.000000
6/22/2010	1:50:39 PM	PHl3 MFC set to  0.000000
6/22/2010	1:50:39 PM	SiCl4 MFC set to  0.000000
6/22/2010	1:50:39 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	1:50:39 PM	Tube furnace set to 0
6/22/2010	1:55:39 PM	H2 valve closed
6/22/2010	1:55:39 PM	BCl3 valve closed
6/22/2010	1:55:39 PM	PH3 valve closed
6/22/2010	1:55:39 PM	SiCl4 pre valve closed
6/22/2010	1:55:39 PM	SiCl4 post valve closed
6/22/2010	1:55:39 PM	Bubbler valve closed
6/22/2010	1:55:39 PM	Helium valve opened
6/22/2010	1:55:39 PM	Main Vac valve opened
6/22/2010	1:55:39 PM	Bypass valve opened
6/22/2010	1:55:39 PM	Helium MFC set to  500.000000
6/22/2010	1:55:39 PM	H2 MFC set to  0.000000
6/22/2010	1:55:39 PM	BCl3 MFC set to  0.000000
6/22/2010	1:55:39 PM	PHl3 MFC set to  0.000000
6/22/2010	1:55:39 PM	SiCl4 MFC set to  0.000000
6/22/2010	1:55:39 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	1:55:39 PM	Tube furnace set to 0
6/22/2010	2:00:40 PM	Helium valve closed
6/22/2010	2:00:40 PM	H2 valve closed
6/22/2010	2:00:40 PM	BCl3 valve closed
6/22/2010	2:00:40 PM	PH3 valve closed
6/22/2010	2:00:40 PM	SiCl4 pre valve closed
6/22/2010	2:00:40 PM	SiCl4 post valve closed
6/22/2010	2:00:40 PM	Bubbler valve closed
6/22/2010	2:00:40 PM	Main Vac valve opened
6/22/2010	2:00:40 PM	Bypass valve opened
6/22/2010	2:00:40 PM	Helium MFC set to  0.000000
6/22/2010	2:00:40 PM	H2 MFC set to  0.000000
6/22/2010	2:00:40 PM	BCl3 MFC set to  0.000000
6/22/2010	2:00:40 PM	PHl3 MFC set to  0.000000
6/22/2010	2:00:40 PM	SiCl4 MFC set to  0.000000
6/22/2010	2:00:40 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:00:40 PM	Tube furnace set to 0
6/22/2010	2:05:40 PM	H2 valve closed
6/22/2010	2:05:40 PM	BCl3 valve closed
6/22/2010	2:05:40 PM	PH3 valve closed
6/22/2010	2:05:40 PM	SiCl4 pre valve closed
6/22/2010	2:05:40 PM	SiCl4 post valve closed
6/22/2010	2:05:40 PM	Bubbler valve closed
6/22/2010	2:05:40 PM	Helium valve opened
6/22/2010	2:05:40 PM	Main Vac valve opened
6/22/2010	2:05:40 PM	Bypass valve opened
6/22/2010	2:05:40 PM	Helium MFC set to  500.000000
6/22/2010	2:05:40 PM	H2 MFC set to  0.000000
6/22/2010	2:05:40 PM	BCl3 MFC set to  0.000000
6/22/2010	2:05:40 PM	PHl3 MFC set to  0.000000
6/22/2010	2:05:40 PM	SiCl4 MFC set to  0.000000
6/22/2010	2:05:40 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:05:40 PM	Tube furnace set to 0
6/22/2010	2:10:40 PM	Helium valve closed
6/22/2010	2:10:40 PM	H2 valve closed
6/22/2010	2:10:40 PM	BCl3 valve closed
6/22/2010	2:10:40 PM	PH3 valve closed
6/22/2010	2:10:40 PM	SiCl4 pre valve closed
6/22/2010	2:10:40 PM	SiCl4 post valve closed
6/22/2010	2:10:40 PM	Bubbler valve closed
6/22/2010	2:10:40 PM	Main Vac valve opened
6/22/2010	2:10:40 PM	Bypass valve opened
6/22/2010	2:10:40 PM	Helium MFC set to  0.000000
6/22/2010	2:10:40 PM	H2 MFC set to  0.000000
6/22/2010	2:10:40 PM	BCl3 MFC set to  0.000000
6/22/2010	2:10:40 PM	PHl3 MFC set to  0.000000
6/22/2010	2:10:40 PM	SiCl4 MFC set to  0.000000
6/22/2010	2:10:40 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:10:40 PM	Tube furnace set to 0
6/22/2010	2:15:40 PM	H2 valve closed
6/22/2010	2:15:40 PM	BCl3 valve closed
6/22/2010	2:15:40 PM	PH3 valve closed
6/22/2010	2:15:40 PM	SiCl4 pre valve closed
6/22/2010	2:15:40 PM	SiCl4 post valve closed
6/22/2010	2:15:40 PM	Bubbler valve closed
6/22/2010	2:15:40 PM	Helium valve opened
6/22/2010	2:15:40 PM	Main Vac valve opened
6/22/2010	2:15:40 PM	Bypass valve opened
6/22/2010	2:15:40 PM	Helium MFC set to  500.000000
6/22/2010	2:15:40 PM	H2 MFC set to  0.000000
6/22/2010	2:15:40 PM	BCl3 MFC set to  0.000000
6/22/2010	2:15:40 PM	PHl3 MFC set to  0.000000
6/22/2010	2:15:40 PM	SiCl4 MFC set to  0.000000
6/22/2010	2:15:40 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:15:40 PM	Tube furnace set to 0
6/22/2010	2:20:40 PM	Helium valve closed
6/22/2010	2:20:40 PM	H2 valve closed
6/22/2010	2:20:40 PM	BCl3 valve closed
6/22/2010	2:20:40 PM	PH3 valve closed
6/22/2010	2:20:40 PM	SiCl4 pre valve closed
6/22/2010	2:20:40 PM	SiCl4 post valve closed
6/22/2010	2:20:40 PM	Bubbler valve closed
6/22/2010	2:20:40 PM	Main Vac valve opened
6/22/2010	2:20:40 PM	Bypass valve opened
6/22/2010	2:20:40 PM	Helium MFC set to  0.000000
6/22/2010	2:20:40 PM	H2 MFC set to  0.000000
6/22/2010	2:20:40 PM	BCl3 MFC set to  0.000000
6/22/2010	2:20:40 PM	PHl3 MFC set to  0.000000
6/22/2010	2:20:40 PM	SiCl4 MFC set to  0.000000
6/22/2010	2:20:40 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:20:40 PM	Tube furnace set to 0
6/22/2010	2:25:40 PM	H2 valve closed
6/22/2010	2:25:40 PM	BCl3 valve closed
6/22/2010	2:25:40 PM	PH3 valve closed
6/22/2010	2:25:40 PM	SiCl4 pre valve closed
6/22/2010	2:25:40 PM	SiCl4 post valve closed
6/22/2010	2:25:40 PM	Bubbler valve closed
6/22/2010	2:25:40 PM	Helium valve opened
6/22/2010	2:25:40 PM	Main Vac valve opened
6/22/2010	2:25:40 PM	Bypass valve opened
6/22/2010	2:25:40 PM	Helium MFC set to  500.000000
6/22/2010	2:25:40 PM	H2 MFC set to  0.000000
6/22/2010	2:25:40 PM	BCl3 MFC set to  0.000000
6/22/2010	2:25:40 PM	PHl3 MFC set to  0.000000
6/22/2010	2:25:40 PM	SiCl4 MFC set to  0.000000
6/22/2010	2:25:40 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:25:41 PM	Tube furnace set to 0
6/22/2010	2:30:41 PM	Helium valve closed
6/22/2010	2:30:41 PM	H2 valve closed
6/22/2010	2:30:41 PM	BCl3 valve closed
6/22/2010	2:30:41 PM	PH3 valve closed
6/22/2010	2:30:41 PM	SiCl4 pre valve closed
6/22/2010	2:30:41 PM	SiCl4 post valve closed
6/22/2010	2:30:41 PM	Bubbler valve closed
6/22/2010	2:30:41 PM	Main Vac valve opened
6/22/2010	2:30:41 PM	Bypass valve opened
6/22/2010	2:30:41 PM	Helium MFC set to  0.000000
6/22/2010	2:30:41 PM	H2 MFC set to  0.000000
6/22/2010	2:30:41 PM	BCl3 MFC set to  0.000000
6/22/2010	2:30:41 PM	PHl3 MFC set to  0.000000
6/22/2010	2:30:41 PM	SiCl4 MFC set to  0.000000
6/22/2010	2:30:41 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:30:41 PM	Tube furnace set to 0
6/22/2010	2:35:41 PM	H2 valve closed
6/22/2010	2:35:41 PM	BCl3 valve closed
6/22/2010	2:35:41 PM	PH3 valve closed
6/22/2010	2:35:41 PM	SiCl4 pre valve closed
6/22/2010	2:35:41 PM	SiCl4 post valve closed
6/22/2010	2:35:41 PM	Bubbler valve closed
6/22/2010	2:35:41 PM	Helium valve opened
6/22/2010	2:35:41 PM	Main Vac valve opened
6/22/2010	2:35:41 PM	Bypass valve opened
6/22/2010	2:35:41 PM	Helium MFC set to  500.000000
6/22/2010	2:35:41 PM	H2 MFC set to  0.000000
6/22/2010	2:35:41 PM	BCl3 MFC set to  0.000000
6/22/2010	2:35:41 PM	PHl3 MFC set to  0.000000
6/22/2010	2:35:41 PM	SiCl4 MFC set to  0.000000
6/22/2010	2:35:41 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:35:41 PM	Tube furnace set to 0
6/22/2010	2:40:41 PM	Helium valve closed
6/22/2010	2:40:41 PM	H2 valve closed
6/22/2010	2:40:41 PM	BCl3 valve closed
6/22/2010	2:40:41 PM	PH3 valve closed
6/22/2010	2:40:41 PM	SiCl4 pre valve closed
6/22/2010	2:40:41 PM	SiCl4 post valve closed
6/22/2010	2:40:41 PM	Bubbler valve closed
6/22/2010	2:40:41 PM	Main Vac valve opened
6/22/2010	2:40:41 PM	Bypass valve opened
6/22/2010	2:40:41 PM	Helium MFC set to  0.000000
6/22/2010	2:40:41 PM	H2 MFC set to  0.000000
6/22/2010	2:40:41 PM	BCl3 MFC set to  0.000000
6/22/2010	2:40:41 PM	PHl3 MFC set to  0.000000
6/22/2010	2:40:41 PM	SiCl4 MFC set to  0.000000
6/22/2010	2:40:41 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:40:41 PM	Tube furnace set to 0
6/22/2010	2:45:41 PM	Run finished at 2:45 PM
6/22/2010	2:50:15 PM	Recipe started at 2:50 PM
6/22/2010	2:50:15 PM	H2 valve closed
6/22/2010	2:50:15 PM	BCl3 valve closed
6/22/2010	2:50:15 PM	PH3 valve closed
6/22/2010	2:50:15 PM	SiCl4 pre valve closed
6/22/2010	2:50:15 PM	SiCl4 post valve closed
6/22/2010	2:50:15 PM	Main Vac valve closed
6/22/2010	2:50:15 PM	Bypass valve closed
6/22/2010	2:50:15 PM	Bubbler valve closed
6/22/2010	2:50:15 PM	Helium valve opened
6/22/2010	2:50:15 PM	Helium MFC set to  500.000000
6/22/2010	2:50:15 PM	H2 MFC set to  0.000000
6/22/2010	2:50:15 PM	BCl3 MFC set to  0.000000
6/22/2010	2:50:15 PM	PHl3 MFC set to  0.000000
6/22/2010	2:50:15 PM	SiCl4 MFC set to  0.000000
6/22/2010	2:50:15 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:50:15 PM	Tube furnace set to 0
6/22/2010	2:50:19 PM	Helium valve closed
6/22/2010	2:50:19 PM	H2 valve closed
6/22/2010	2:50:19 PM	BCl3 valve closed
6/22/2010	2:50:19 PM	PH3 valve closed
6/22/2010	2:50:19 PM	SiCl4 pre valve closed
6/22/2010	2:50:19 PM	SiCl4 post valve closed
6/22/2010	2:50:19 PM	Main Vac valve closed
6/22/2010	2:50:19 PM	Bypass valve closed
6/22/2010	2:50:19 PM	Bubbler valve closed
6/22/2010	2:50:19 PM	Helium MFC set to  0.000000
6/22/2010	2:50:19 PM	H2 MFC set to  0.000000
6/22/2010	2:50:19 PM	BCl3 MFC set to  0.000000
6/22/2010	2:50:19 PM	PHl3 MFC set to  0.000000
6/22/2010	2:50:19 PM	SiCl4 MFC set to  0.000000
6/22/2010	2:50:19 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:50:19 PM	Tube furnace set to 0
6/22/2010	2:50:23 PM	Helium valve closed
6/22/2010	2:50:23 PM	H2 valve closed
6/22/2010	2:50:23 PM	BCl3 valve closed
6/22/2010	2:50:23 PM	PH3 valve closed
6/22/2010	2:50:23 PM	SiCl4 pre valve closed
6/22/2010	2:50:23 PM	SiCl4 post valve closed
6/22/2010	2:50:23 PM	Main Vac valve closed
6/22/2010	2:50:23 PM	Bubbler valve closed
6/22/2010	2:50:23 PM	Bypass valve opened
6/22/2010	2:50:23 PM	Helium MFC set to  0.000000
6/22/2010	2:50:23 PM	H2 MFC set to  0.000000
6/22/2010	2:50:23 PM	BCl3 MFC set to  0.000000
6/22/2010	2:50:23 PM	PHl3 MFC set to  0.000000
6/22/2010	2:50:23 PM	SiCl4 MFC set to  0.000000
6/22/2010	2:50:23 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:50:23 PM	Tube furnace set to 0
6/22/2010	2:50:23 PM	Helium valve closed
6/22/2010	2:50:23 PM	H2 valve closed
6/22/2010	2:50:23 PM	BCl3 valve closed
6/22/2010	2:50:23 PM	PH3 valve closed
6/22/2010	2:50:23 PM	SiCl4 pre valve closed
6/22/2010	2:50:23 PM	SiCl4 post valve closed
6/22/2010	2:50:23 PM	Bubbler valve closed
6/22/2010	2:50:23 PM	Main Vac valve opened
6/22/2010	2:50:23 PM	Bypass valve opened
6/22/2010	2:50:23 PM	Helium MFC set to  0.000000
6/22/2010	2:50:23 PM	H2 MFC set to  0.000000
6/22/2010	2:50:23 PM	BCl3 MFC set to  0.000000
6/22/2010	2:50:23 PM	PHl3 MFC set to  0.000000
6/22/2010	2:50:23 PM	SiCl4 MFC set to  0.000000
6/22/2010	2:50:23 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:50:23 PM	Tube furnace set to 0
6/22/2010	2:50:29 PM	H2 valve closed
6/22/2010	2:50:29 PM	BCl3 valve closed
6/22/2010	2:50:29 PM	PH3 valve closed
6/22/2010	2:50:29 PM	SiCl4 pre valve closed
6/22/2010	2:50:29 PM	SiCl4 post valve closed
6/22/2010	2:50:29 PM	Main Vac valve closed
6/22/2010	2:50:29 PM	Bypass valve closed
6/22/2010	2:50:29 PM	Bubbler valve closed
6/22/2010	2:50:29 PM	Helium valve opened
6/22/2010	2:50:29 PM	Helium MFC set to  500.000000
6/22/2010	2:50:29 PM	H2 MFC set to  0.000000
6/22/2010	2:50:29 PM	BCl3 MFC set to  0.000000
6/22/2010	2:50:29 PM	PHl3 MFC set to  0.000000
6/22/2010	2:50:29 PM	SiCl4 MFC set to  0.000000
6/22/2010	2:50:29 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:50:29 PM	Tube furnace set to 0
6/22/2010	2:50:36 PM	Helium valve closed
6/22/2010	2:50:36 PM	H2 valve closed
6/22/2010	2:50:36 PM	BCl3 valve closed
6/22/2010	2:50:36 PM	PH3 valve closed
6/22/2010	2:50:36 PM	SiCl4 pre valve closed
6/22/2010	2:50:36 PM	SiCl4 post valve closed
6/22/2010	2:50:36 PM	Main Vac valve closed
6/22/2010	2:50:36 PM	Bypass valve closed
6/22/2010	2:50:36 PM	Bubbler valve closed
6/22/2010	2:50:36 PM	Helium MFC set to  0.000000
6/22/2010	2:50:36 PM	H2 MFC set to  0.000000
6/22/2010	2:50:36 PM	BCl3 MFC set to  0.000000
6/22/2010	2:50:36 PM	PHl3 MFC set to  0.000000
6/22/2010	2:50:36 PM	SiCl4 MFC set to  0.000000
6/22/2010	2:50:36 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:50:36 PM	Tube furnace set to 0
6/22/2010	2:50:39 PM	Helium valve closed
6/22/2010	2:50:39 PM	H2 valve closed
6/22/2010	2:50:39 PM	BCl3 valve closed
6/22/2010	2:50:39 PM	PH3 valve closed
6/22/2010	2:50:39 PM	SiCl4 pre valve closed
6/22/2010	2:50:39 PM	SiCl4 post valve closed
6/22/2010	2:50:39 PM	Main Vac valve closed
6/22/2010	2:50:39 PM	Bubbler valve closed
6/22/2010	2:50:39 PM	Bypass valve opened
6/22/2010	2:50:39 PM	Helium MFC set to  0.000000
6/22/2010	2:50:39 PM	H2 MFC set to  0.000000
6/22/2010	2:50:39 PM	BCl3 MFC set to  0.000000
6/22/2010	2:50:39 PM	PHl3 MFC set to  0.000000
6/22/2010	2:50:39 PM	SiCl4 MFC set to  0.000000
6/22/2010	2:50:39 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:50:39 PM	Tube furnace set to 0
6/22/2010	2:50:43 PM	Helium valve closed
6/22/2010	2:50:43 PM	H2 valve closed
6/22/2010	2:50:43 PM	BCl3 valve closed
6/22/2010	2:50:43 PM	PH3 valve closed
6/22/2010	2:50:43 PM	SiCl4 pre valve closed
6/22/2010	2:50:43 PM	SiCl4 post valve closed
6/22/2010	2:50:43 PM	Bubbler valve closed
6/22/2010	2:50:43 PM	Main Vac valve opened
6/22/2010	2:50:43 PM	Bypass valve opened
6/22/2010	2:50:43 PM	Helium MFC set to  0.000000
6/22/2010	2:50:43 PM	H2 MFC set to  0.000000
6/22/2010	2:50:43 PM	BCl3 MFC set to  0.000000
6/22/2010	2:50:43 PM	PHl3 MFC set to  0.000000
6/22/2010	2:50:43 PM	SiCl4 MFC set to  0.000000
6/22/2010	2:50:43 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:50:43 PM	Tube furnace set to 0
6/22/2010	2:55:43 PM	H2 valve closed
6/22/2010	2:55:43 PM	BCl3 valve closed
6/22/2010	2:55:43 PM	PH3 valve closed
6/22/2010	2:55:43 PM	SiCl4 pre valve closed
6/22/2010	2:55:43 PM	SiCl4 post valve closed
6/22/2010	2:55:43 PM	Main Vac valve closed
6/22/2010	2:55:43 PM	Bypass valve closed
6/22/2010	2:55:43 PM	Bubbler valve closed
6/22/2010	2:55:43 PM	Helium valve opened
6/22/2010	2:55:43 PM	Helium MFC set to  500.000000
6/22/2010	2:55:43 PM	H2 MFC set to  0.000000
6/22/2010	2:55:43 PM	BCl3 MFC set to  0.000000
6/22/2010	2:55:43 PM	PHl3 MFC set to  0.000000
6/22/2010	2:55:43 PM	SiCl4 MFC set to  0.000000
6/22/2010	2:55:43 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:55:43 PM	Tube furnace set to 0
6/22/2010	2:57:04 PM	Helium valve closed
6/22/2010	2:57:04 PM	H2 valve closed
6/22/2010	2:57:04 PM	BCl3 valve closed
6/22/2010	2:57:04 PM	PH3 valve closed
6/22/2010	2:57:04 PM	SiCl4 pre valve closed
6/22/2010	2:57:04 PM	SiCl4 post valve closed
6/22/2010	2:57:04 PM	Main Vac valve closed
6/22/2010	2:57:04 PM	Bypass valve closed
6/22/2010	2:57:04 PM	Bubbler valve closed
6/22/2010	2:57:04 PM	Helium MFC set to  0.000000
6/22/2010	2:57:04 PM	H2 MFC set to  0.000000
6/22/2010	2:57:04 PM	BCl3 MFC set to  0.000000
6/22/2010	2:57:04 PM	PHl3 MFC set to  0.000000
6/22/2010	2:57:04 PM	SiCl4 MFC set to  0.000000
6/22/2010	2:57:04 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:57:04 PM	Tube furnace set to 0
6/22/2010	2:57:19 PM	Helium valve closed
6/22/2010	2:57:19 PM	H2 valve closed
6/22/2010	2:57:19 PM	BCl3 valve closed
6/22/2010	2:57:19 PM	PH3 valve closed
6/22/2010	2:57:19 PM	SiCl4 pre valve closed
6/22/2010	2:57:19 PM	SiCl4 post valve closed
6/22/2010	2:57:19 PM	Main Vac valve closed
6/22/2010	2:57:19 PM	Bubbler valve closed
6/22/2010	2:57:19 PM	Bypass valve opened
6/22/2010	2:57:19 PM	Helium MFC set to  0.000000
6/22/2010	2:57:19 PM	H2 MFC set to  0.000000
6/22/2010	2:57:19 PM	BCl3 MFC set to  0.000000
6/22/2010	2:57:19 PM	PHl3 MFC set to  0.000000
6/22/2010	2:57:19 PM	SiCl4 MFC set to  0.000000
6/22/2010	2:57:19 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:57:19 PM	Tube furnace set to 0
6/22/2010	2:57:53 PM	Helium valve closed
6/22/2010	2:57:53 PM	H2 valve closed
6/22/2010	2:57:53 PM	BCl3 valve closed
6/22/2010	2:57:53 PM	PH3 valve closed
6/22/2010	2:57:53 PM	SiCl4 pre valve closed
6/22/2010	2:57:53 PM	SiCl4 post valve closed
6/22/2010	2:57:53 PM	Bubbler valve closed
6/22/2010	2:57:53 PM	Main Vac valve opened
6/22/2010	2:57:53 PM	Bypass valve opened
6/22/2010	2:57:53 PM	Helium MFC set to  0.000000
6/22/2010	2:57:53 PM	H2 MFC set to  0.000000
6/22/2010	2:57:53 PM	BCl3 MFC set to  0.000000
6/22/2010	2:57:53 PM	PHl3 MFC set to  0.000000
6/22/2010	2:57:53 PM	SiCl4 MFC set to  0.000000
6/22/2010	2:57:53 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	2:57:53 PM	Tube furnace set to 0
6/22/2010	3:02:53 PM	H2 valve closed
6/22/2010	3:02:53 PM	BCl3 valve closed
6/22/2010	3:02:53 PM	PH3 valve closed
6/22/2010	3:02:53 PM	SiCl4 pre valve closed
6/22/2010	3:02:53 PM	SiCl4 post valve closed
6/22/2010	3:02:53 PM	Bubbler valve closed
6/22/2010	3:02:53 PM	Helium valve opened
6/22/2010	3:02:53 PM	Main Vac valve opened
6/22/2010	3:02:53 PM	Bypass valve opened
6/22/2010	3:02:53 PM	Helium MFC set to  500.000000
6/22/2010	3:02:53 PM	H2 MFC set to  0.000000
6/22/2010	3:02:53 PM	BCl3 MFC set to  0.000000
6/22/2010	3:02:53 PM	PHl3 MFC set to  0.000000
6/22/2010	3:02:53 PM	SiCl4 MFC set to  0.000000
6/22/2010	3:02:53 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	3:02:53 PM	Tube furnace set to 0
6/22/2010	3:07:53 PM	Helium valve closed
6/22/2010	3:07:53 PM	H2 valve closed
6/22/2010	3:07:53 PM	BCl3 valve closed
6/22/2010	3:07:53 PM	PH3 valve closed
6/22/2010	3:07:53 PM	SiCl4 pre valve closed
6/22/2010	3:07:53 PM	SiCl4 post valve closed
6/22/2010	3:07:53 PM	Bubbler valve closed
6/22/2010	3:07:53 PM	Main Vac valve opened
6/22/2010	3:07:53 PM	Bypass valve opened
6/22/2010	3:07:53 PM	Helium MFC set to  0.000000
6/22/2010	3:07:53 PM	H2 MFC set to  0.000000
6/22/2010	3:07:53 PM	BCl3 MFC set to  0.000000
6/22/2010	3:07:53 PM	PHl3 MFC set to  0.000000
6/22/2010	3:07:53 PM	SiCl4 MFC set to  0.000000
6/22/2010	3:07:53 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	3:07:53 PM	Tube furnace set to 0
6/22/2010	3:12:53 PM	H2 valve closed
6/22/2010	3:12:53 PM	BCl3 valve closed
6/22/2010	3:12:53 PM	PH3 valve closed
6/22/2010	3:12:53 PM	SiCl4 pre valve closed
6/22/2010	3:12:53 PM	SiCl4 post valve closed
6/22/2010	3:12:53 PM	Bubbler valve closed
6/22/2010	3:12:53 PM	Helium valve opened
6/22/2010	3:12:53 PM	Main Vac valve opened
6/22/2010	3:12:53 PM	Bypass valve opened
6/22/2010	3:12:54 PM	Helium MFC set to  500.000000
6/22/2010	3:12:54 PM	H2 MFC set to  0.000000
6/22/2010	3:12:54 PM	BCl3 MFC set to  0.000000
6/22/2010	3:12:54 PM	PHl3 MFC set to  0.000000
6/22/2010	3:12:54 PM	SiCl4 MFC set to  0.000000
6/22/2010	3:12:54 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	3:12:54 PM	Tube furnace set to 0
6/22/2010	3:14:28 PM	Helium valve closed
6/22/2010	3:14:28 PM	H2 valve closed
6/22/2010	3:14:28 PM	BCl3 valve closed
6/22/2010	3:14:28 PM	PH3 valve closed
6/22/2010	3:14:28 PM	SiCl4 pre valve closed
6/22/2010	3:14:28 PM	SiCl4 post valve closed
6/22/2010	3:14:28 PM	Bubbler valve closed
6/22/2010	3:14:28 PM	Main Vac valve opened
6/22/2010	3:14:28 PM	Bypass valve opened
6/22/2010	3:14:28 PM	Helium MFC set to  0.000000
6/22/2010	3:14:28 PM	H2 MFC set to  0.000000
6/22/2010	3:14:28 PM	BCl3 MFC set to  0.000000
6/22/2010	3:14:28 PM	PHl3 MFC set to  0.000000
6/22/2010	3:14:28 PM	SiCl4 MFC set to  0.000000
6/22/2010	3:14:28 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	3:14:28 PM	Tube furnace set to 0
6/22/2010	3:16:57 PM	H2 valve closed
6/22/2010	3:16:57 PM	BCl3 valve closed
6/22/2010	3:16:57 PM	PH3 valve closed
6/22/2010	3:16:57 PM	SiCl4 pre valve closed
6/22/2010	3:16:57 PM	SiCl4 post valve closed
6/22/2010	3:16:57 PM	Bubbler valve closed
6/22/2010	3:16:57 PM	Helium valve opened
6/22/2010	3:16:57 PM	Main Vac valve opened
6/22/2010	3:16:57 PM	Bypass valve opened
6/22/2010	3:16:57 PM	Helium MFC set to  500.000000
6/22/2010	3:16:57 PM	H2 MFC set to  0.000000
6/22/2010	3:16:57 PM	BCl3 MFC set to  0.000000
6/22/2010	3:16:57 PM	PHl3 MFC set to  0.000000
6/22/2010	3:16:57 PM	SiCl4 MFC set to  0.000000
6/22/2010	3:16:57 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	3:16:57 PM	Tube furnace set to 0
6/22/2010	3:21:57 PM	Helium valve closed
6/22/2010	3:21:57 PM	H2 valve closed
6/22/2010	3:21:57 PM	BCl3 valve closed
6/22/2010	3:21:57 PM	PH3 valve closed
6/22/2010	3:21:57 PM	SiCl4 pre valve closed
6/22/2010	3:21:57 PM	SiCl4 post valve closed
6/22/2010	3:21:57 PM	Bubbler valve closed
6/22/2010	3:21:57 PM	Main Vac valve opened
6/22/2010	3:21:57 PM	Bypass valve opened
6/22/2010	3:21:57 PM	Helium MFC set to  0.000000
6/22/2010	3:21:57 PM	H2 MFC set to  0.000000
6/22/2010	3:21:57 PM	BCl3 MFC set to  0.000000
6/22/2010	3:21:57 PM	PHl3 MFC set to  0.000000
6/22/2010	3:21:57 PM	SiCl4 MFC set to  0.000000
6/22/2010	3:21:57 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	3:21:57 PM	Tube furnace set to 0
6/22/2010	3:26:57 PM	H2 valve closed
6/22/2010	3:26:57 PM	BCl3 valve closed
6/22/2010	3:26:57 PM	PH3 valve closed
6/22/2010	3:26:57 PM	SiCl4 pre valve closed
6/22/2010	3:26:57 PM	SiCl4 post valve closed
6/22/2010	3:26:57 PM	Bubbler valve closed
6/22/2010	3:26:57 PM	Helium valve opened
6/22/2010	3:26:57 PM	Main Vac valve opened
6/22/2010	3:26:57 PM	Bypass valve opened
6/22/2010	3:26:57 PM	Helium MFC set to  500.000000
6/22/2010	3:26:57 PM	H2 MFC set to  0.000000
6/22/2010	3:26:57 PM	BCl3 MFC set to  0.000000
6/22/2010	3:26:57 PM	PHl3 MFC set to  0.000000
6/22/2010	3:26:57 PM	SiCl4 MFC set to  0.000000
6/22/2010	3:26:57 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	3:26:58 PM	Tube furnace set to 0
6/22/2010	3:31:58 PM	Helium valve closed
6/22/2010	3:31:58 PM	H2 valve closed
6/22/2010	3:31:58 PM	BCl3 valve closed
6/22/2010	3:31:58 PM	PH3 valve closed
6/22/2010	3:31:58 PM	SiCl4 pre valve closed
6/22/2010	3:31:58 PM	SiCl4 post valve closed
6/22/2010	3:31:58 PM	Bubbler valve closed
6/22/2010	3:31:58 PM	Main Vac valve opened
6/22/2010	3:31:58 PM	Bypass valve opened
6/22/2010	3:31:58 PM	Helium MFC set to  0.000000
6/22/2010	3:31:58 PM	H2 MFC set to  0.000000
6/22/2010	3:31:58 PM	BCl3 MFC set to  0.000000
6/22/2010	3:31:58 PM	PHl3 MFC set to  0.000000
6/22/2010	3:31:58 PM	SiCl4 MFC set to  0.000000
6/22/2010	3:31:58 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	3:31:58 PM	Tube furnace set to 0
6/22/2010	3:36:58 PM	H2 valve closed
6/22/2010	3:36:58 PM	BCl3 valve closed
6/22/2010	3:36:58 PM	PH3 valve closed
6/22/2010	3:36:58 PM	SiCl4 pre valve closed
6/22/2010	3:36:58 PM	SiCl4 post valve closed
6/22/2010	3:36:58 PM	Bubbler valve closed
6/22/2010	3:36:58 PM	Helium valve opened
6/22/2010	3:36:58 PM	Main Vac valve opened
6/22/2010	3:36:58 PM	Bypass valve opened
6/22/2010	3:36:58 PM	Helium MFC set to  500.000000
6/22/2010	3:36:58 PM	H2 MFC set to  0.000000
6/22/2010	3:36:58 PM	BCl3 MFC set to  0.000000
6/22/2010	3:36:58 PM	PHl3 MFC set to  0.000000
6/22/2010	3:36:58 PM	SiCl4 MFC set to  0.000000
6/22/2010	3:36:58 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	3:36:58 PM	Tube furnace set to 0
6/22/2010	3:41:40 PM	Helium valve closed
6/22/2010	3:41:40 PM	H2 valve closed
6/22/2010	3:41:40 PM	BCl3 valve closed
6/22/2010	3:41:40 PM	PH3 valve closed
6/22/2010	3:41:40 PM	SiCl4 pre valve closed
6/22/2010	3:41:40 PM	SiCl4 post valve closed
6/22/2010	3:41:40 PM	Bubbler valve closed
6/22/2010	3:41:40 PM	Main Vac valve opened
6/22/2010	3:41:40 PM	Bypass valve opened
6/22/2010	3:41:40 PM	Helium MFC set to  0.000000
6/22/2010	3:41:40 PM	H2 MFC set to  0.000000
6/22/2010	3:41:40 PM	BCl3 MFC set to  0.000000
6/22/2010	3:41:40 PM	PHl3 MFC set to  0.000000
6/22/2010	3:41:40 PM	SiCl4 MFC set to  0.000000
6/22/2010	3:41:40 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	3:41:40 PM	Tube furnace set to 0
6/22/2010	3:42:22 PM	Run aborted at 3:42 PM
6/22/2010	3:42:22 PM	Helium valve closed
6/22/2010	3:42:22 PM	H2 valve closed
6/22/2010	3:42:22 PM	BCl3 valve closed
6/22/2010	3:42:22 PM	PH3 valve closed
6/22/2010	3:42:22 PM	SiCl4 pre valve closed
6/22/2010	3:42:22 PM	SiCl4 post valve closed
6/22/2010	3:42:22 PM	Bypass valve closed
6/22/2010	3:42:22 PM	Main Vac valve closed
6/22/2010	3:42:22 PM	Bubbler valve closed
6/22/2010	3:42:22 PM	Helium MFC set to  0.000000
6/22/2010	3:42:22 PM	H2 MFC set to  0.000000
6/22/2010	3:42:22 PM	BCl3 MFC set to  0.000000
6/22/2010	3:42:22 PM	PHl3 MFC set to  0.000000
6/22/2010	3:42:22 PM	SiCl4 MFC set to  0.000000
6/22/2010	3:42:22 PM	Tube furnace set to 0
6/22/2010	3:42:32 PM	Bypass valve closed
6/22/2010	3:42:32 PM	Bypass valve opened
6/22/2010	3:42:33 PM	Main Vac valve closed
6/22/2010	3:42:34 PM	Main Vac valve opened
6/22/2010	3:42:39 PM	Helium MFC set to  500.000000
6/22/2010	3:42:40 PM	Helium valve opened
6/22/2010	4:21:45 PM	Helium MFC set to  0.000000
6/22/2010	4:21:47 PM	Helium valve closed
6/22/2010	4:34:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/22/2010	4:34:46 PM	Recipe started at 4:34 PM
6/22/2010	4:34:46 PM	H2 valve closed
6/22/2010	4:34:46 PM	BCl3 valve closed
6/22/2010	4:34:46 PM	PH3 valve closed
6/22/2010	4:34:46 PM	SiCl4 pre valve closed
6/22/2010	4:34:46 PM	SiCl4 post valve closed
6/22/2010	4:34:46 PM	Main Vac valve closed
6/22/2010	4:34:46 PM	Bypass valve closed
6/22/2010	4:34:46 PM	Bubbler valve closed
6/22/2010	4:34:46 PM	Helium valve opened
6/22/2010	4:34:46 PM	Helium MFC set to  500.000000
6/22/2010	4:34:46 PM	H2 MFC set to  0.000000
6/22/2010	4:34:46 PM	BCl3 MFC set to  0.000000
6/22/2010	4:34:46 PM	PHl3 MFC set to  0.000000
6/22/2010	4:34:46 PM	SiCl4 MFC set to  0.000000
6/22/2010	4:34:46 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	4:34:46 PM	Tube furnace set to 0
6/22/2010	4:36:06 PM	Helium valve closed
6/22/2010	4:36:06 PM	H2 valve closed
6/22/2010	4:36:06 PM	BCl3 valve closed
6/22/2010	4:36:06 PM	PH3 valve closed
6/22/2010	4:36:06 PM	SiCl4 pre valve closed
6/22/2010	4:36:06 PM	SiCl4 post valve closed
6/22/2010	4:36:06 PM	Main Vac valve closed
6/22/2010	4:36:06 PM	Bypass valve closed
6/22/2010	4:36:06 PM	Bubbler valve closed
6/22/2010	4:36:06 PM	Helium MFC set to  0.000000
6/22/2010	4:36:06 PM	H2 MFC set to  0.000000
6/22/2010	4:36:06 PM	BCl3 MFC set to  0.000000
6/22/2010	4:36:06 PM	PHl3 MFC set to  0.000000
6/22/2010	4:36:06 PM	SiCl4 MFC set to  0.000000
6/22/2010	4:36:06 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	4:36:06 PM	Tube furnace set to 0
6/22/2010	4:36:06 PM	Run finished at 4:36 PM
6/22/2010	4:36:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/22/2010	4:38:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/22/2010	4:38:48 PM	Recipe started at 4:38 PM
6/22/2010	4:38:48 PM	Helium valve closed
6/22/2010	4:38:48 PM	H2 valve closed
6/22/2010	4:38:48 PM	BCl3 valve closed
6/22/2010	4:38:48 PM	PH3 valve closed
6/22/2010	4:38:48 PM	SiCl4 pre valve closed
6/22/2010	4:38:48 PM	SiCl4 post valve closed
6/22/2010	4:38:48 PM	Main Vac valve closed
6/22/2010	4:38:48 PM	Bubbler valve closed
6/22/2010	4:38:48 PM	Bypass valve opened
6/22/2010	4:38:48 PM	Helium MFC set to  0.000000
6/22/2010	4:38:48 PM	H2 MFC set to  0.000000
6/22/2010	4:38:48 PM	BCl3 MFC set to  0.000000
6/22/2010	4:38:48 PM	PHl3 MFC set to  0.000000
6/22/2010	4:38:48 PM	SiCl4 MFC set to  0.000000
6/22/2010	4:38:48 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	4:38:48 PM	Tube furnace set to 0
6/22/2010	4:39:34 PM	Helium valve closed
6/22/2010	4:39:34 PM	H2 valve closed
6/22/2010	4:39:34 PM	BCl3 valve closed
6/22/2010	4:39:34 PM	PH3 valve closed
6/22/2010	4:39:34 PM	SiCl4 pre valve closed
6/22/2010	4:39:34 PM	SiCl4 post valve closed
6/22/2010	4:39:34 PM	Bubbler valve closed
6/22/2010	4:39:34 PM	Main Vac valve opened
6/22/2010	4:39:34 PM	Bypass valve opened
6/22/2010	4:39:34 PM	Helium MFC set to  0.000000
6/22/2010	4:39:34 PM	H2 MFC set to  0.000000
6/22/2010	4:39:34 PM	BCl3 MFC set to  0.000000
6/22/2010	4:39:34 PM	PHl3 MFC set to  0.000000
6/22/2010	4:39:34 PM	SiCl4 MFC set to  0.000000
6/22/2010	4:39:34 PM	Bypass solenoid MFC set to  0.000000
6/22/2010	4:39:34 PM	Tube furnace set to 0
6/22/2010	4:39:35 PM	Run finished at 4:39 PM
6/22/2010	4:39:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
